Step 22B. Dielectric deposition

Step

Process

Date

Operator

22B.1

P5000 (Chamber B, D is down)

Pump and Purge

Running test wafers to check particles

Running the cleaning recipe 3 times

Rec. A-PE-USG-1.0 two times on W#6-10

08/10/07

Pongracz

22B.2

Measure oxide thickness with Nanospec: (Oxide on nitride)

	T	C	F	L	R
TEST	20528	20197	20142	20380	20163
W#6	20298	19915	19865	20285	19844
W#7	20338	19963	19967	19994	20299
W#8	20177	19947	19871	20235	19841
W#9	20176	19926	19755	20196	19828
W#10	20175	19952	19748	20256	19902

08/13/07