Step 28. N Vt implant

 

 

Step

 

Process

Date

Operator

 

28.1

 

 

N Vt implantation adjustment

 

Standard implantation with 7o tilt to prevent channeling

 

W#1-5 and W#11-15 and NCH :  BF2, 3E12, 50KeV for LOCOS process

W#6-10                                      :  BF2, 3.1 E12, 50KeV for STI process

 

 

08/22/07

-08/30/07

 

Core

Systems