Step 3. Scribe wafers

 

 

Step 3.

 

Process

Date

Operator

 

3.1

 

 

Scribe numbers into the photoresist with diamond pen 

Numbers will be etched into Si during the following etch

 

Note: Be careful not to scratch the flat, it can cause wafer breaking in CMP

 

05/11/07

Pongarcz