Step 30. P Vt implant

 

 

Step

 

Process

Date

Operator

 

30.1

 

 

P Vt implantation adjustment

 

Standard implantation with 7o tilt to prevent channeling

 

W#1-15 and PCH :  P, 2E12, 30KeV for LOCOS and STI process

 

 

09/04/07

-

 

Core

Systems