Step 37. NMOS LDD implant

Step	Process	Date	Operator
37.1	NMOS LDD implantation Include NCH, Tploy2 Two identical implantation at two different angle: W#1-15, NCH, Tpoly2 As, 5E13 /cm2, 30 keV , +7^o @ zero degree orientation As, 5E13 /cm2, 30 keV , +7^o @ 180 degree orientation	10/16/07 - 10/22/07	Core Systems