Step 43. N+gate and S/D implant

Step	Process	Date	Operator
43.1	N+gate and S/D implantation Include NCH, Tploy2 W#1-15,  P31, 3E15, 40KeV W#1-4, W#6-14, NCH, Tpoly2 for standard 7 degree implantation W#5 and W#15 for 0 degree implantation	11/02/07 - 11/06/07	Core Systems