Step 10. N-Well implant
|
Step |
Process |
Date |
Operator |
|
10.1 |
N-Well implantation split: Standard implantation with 7o tilt to prevent channeling W#1-5 and W#11-15 and PCH: P31, 2E13, 150KeV for LOCOS process W#6-10: P31, 2E13, 50KeV for STI process |
06/04/07 - |
Core Systems |