Step 10. N-Well implant

 

 

Step

 

Process

Date

Operator

 

10.1

 

 

N-Well implantation split:

 

Standard implantation with 7o tilt to prevent channeling

 

W#1-5 and W#11-15 and PCH:  P31, 2E13, 150KeV for LOCOS process

W#6-10:                                      P31, 2E13, 50KeV   for STI process

 

06/04/07

-

 

Core

Systems