Step 15. P-Well implant
|
Step |
Process |
Date |
Operator |
|
15.1 |
P-Well implantation split: Standard implantation with 7o tilt to prevent channeling W#1-5 and W#11-15 and NCH: B, 5E12, 60KeV for LOCOS process W#6-10: B, 5E12, 20KeV for STI process |
07/03/07 - |
Core Systems |