Step 22A. PFIELD implant

Step	Process	Date	Operator
22A.1	P-Field implantation: Standard implantation with 7^otilt to prevent channeling W#1-5 and W#11-15 and NCH and PCH with the nitride: B, 2E13, 80KeV for LOCOS process	08/07/07 -08/13/07	Core Systems