Lab Manual Chapters

This site provides operational instructions for Microlab equipment,

as well as safety rules, processing information, cleaning procedures, process recipes,

and material compatibility policy and guidelines for the Microlab.

 

(Click on any of the chapters listed below to select from a list of available sub-chapters.)

How to Print a Poster on the HP DesignJet 2500 Plotter

Chapter 1 –   General Information / Processing

Chapter 2 –   Cleaning Procedures

Chapter 3 –   Mask Making

Chapter 4 –   Photolithography

Chapter 5 –   Diffusion Furnaces/Ovens

Chapter 6 –   Thin Film Systems

Chapter 7 –   Etching Systems

Chapter 8 –   Testing/Inspection Equipment

Chapter 9 –   Packaging

Chapter 10 – Planarization