Standard 100 mm VLSI Process Modules
Table of Contents
(Click on MOD to go to the appropriate section.)
MOD 1 Standard
Wafer Cleaning (Piranha Clean)
MOD 2 Standard
Rinse – QDR & SRD
MOD 3 Standard
Oxide Dip
MOD 4 Standard
Dehydration Bake
MOD 5 Dehydration
Bake or Anneal for Old Lab Processed Wafers
MOD 6 Standard
Photoresist Coating Procedure
MOD 7 Standard Photoresist Development
MOD 8 Standard
Hard Bake
MOD 9 Standard
De-Scum Procedure
MOD 10 Photoresist
Removal
MOD 11 PRS-3000 Resist Stripping
MOD 12 Plasma Ashing
of Photoresist
MOD 13 Wafer
Cleaning After Resist Removal
MOD 14 Photoresist Stripping of Hardened Resist
MOD 15 Standard
Wet Oxide Etching
MOD 16 Plasma
Etching in Technics-C
MOD 17 Standard
Furnace Cleaning
MOD 18 Lift Off Process
MOD 19 Spin-On
SiO2 (SOG) for Inter-Metal Dielectric
MOD 20 Standard
Wet Nitride Etching