Chapter 1 - General Information / Process Manual Chapters

Rev. No.	Date	Authors	Description of Revision
1.1 Table of Contents
N/A	2/07	M. Leullier	N/A
1.2 Microlab Safety Rules and Procedures (CHP)
00 01 02 03 04 05 06 07 08	6/01 5/03 6/04, 8/04 3/05 5/05 9/05 8/06 1/07 3/08	R. Hamilton R. Hamilton R. Hamilton W. Flounders R. Hamilton R. Hamilton R. Hamilton, W. Flounders R. Hamilton W. Founders	N/A N/A N/A N/A N/A Updates on 6. Working Chemical Storage and e) Music Players. Added link to new MSDS db available to UC researchers and staff. Minor addition in eyewear paragraph.under 5. Restrictions Note on Special Chemicals. Added sentences in 5. Toxic Metals & Metal Dust on how to clean dust and debris. Added a paragraph in Cryogens Section and changed “flammable and toxic vapors” to “volatile organic compounds” in 8. Chemical Disposal in Organic Solvents.
1.3 Process Modules (click here for details)
1.4 CMOS Process (4”, 1.3 µm)
01	1/01	L. Voros	N/A
1.5 CMOS Processes on 6” Wafers – 1.51 CMOS Process (1 µm)
00 01	5/02 8/05	J. Chang, S. Parsa J. Chang	N/A Added link to Process Monitoring/Furnaces. Modified cleaning procedure.
1.5 CMOS Processes on 6” Wafers – 1.52 CMOS Process (0.35 µm)
00	6/02	L. Voros, S. Parsa	N/A
1.6 Wafer and Substrate Specifications
00 01 02	1/01 11/04 9/05	K. Voros S. Parsa S. Parsa	N/A N/A N/A
1.7 Material & Process Compatibility Policy
00 01 02 03	12/02 11/03 10/04 2/07	W. Flounders, S. Parsa “ “ “	N/A N/A N/A N/A N/A
1.8 Compatibility of Microlab Tools with 4" and 6" Substrates
00 01 02 03 04	8/04 12/04 8/06 7/07 5/08	W. Flounders K. Voros W. Flounders D. Queen M. Leullier	N/A N/A Added hfvapor and vacoven. Revised all links. 1. Randex is available for 6" sputtering but sputter etch is still limited to 4" wafers. 2. The heatpulse4 has been added. 3. Technics-a and technics-b have been removed. Added ‘crestec’ E-Beam writer.
1.9 VLSI Etchants
00 01 02	1/04 5/07 6/07	W. Flounders W. Flounders W. Flounders	N/A Changed specs on Al etchant. Added TMAH 90ºC etchant.
1.10 Miscellaneous Etchants
00 01	10/03 12/06	S. Parsa K. Voros	N/A N/A
1.11 Miscellaneous Plating Solutions
00 01	4/90 1206	K. Voros K. Voros	N/A N/A
1.13 How To Write a Lab Manual Chapter
00 01 02	10/03 4/07 6/07	S. Parsa M. Leullier K. Voros	N/A Added info on Revision History in introduction and in Section 4.0 – Applicable Documents Reviewed and shortened examples.
1.14 How To Print a Poster on the Plotter
00 01	7/04 7/07	M. Leullier M. Leullier	N/A Added Instructions for Producing Posters for SUPERB and some new links.

5/08 – ML