Chapter 2.12
Sinkplate – Electroplating
(sinkplate1, sinkplate2)
1.0
Title
Sinkplate -
Electroplating
2.0
Purpose
The sinkplate is a dedicated sink utilized for electrochemical processes such as electroplating (Ni, Au, etc) and electrochemical etching (Si). The sink is located in the old lab in 432D. Processes are typically user-specific with the user responsible for his/her plating or electrochemical etching solutions. These solutions may be mixed on site in the Microlab or purchased from outside vendors. Those interested in mixing their own solutions may talk to current sinkplate users. In addition a list of solution recipes can be found in Chapter 1.7 of the lab manual.
The sink consists of an
aspirator hose with plenum flush, DI deck hose, city water gooseneck, and N2
gun. Two hotplate/mixers with temperature probes are located at the sink as well.
Location assignment: sinkplate1 – left side of sink low current
supply
sinkplate2
– right side of sink high current supply
Underneath the sink is a
storage area. Personal plating solutions can be stored here. HF and solutions
containing HF should be stored in the large white storage locker located next
to the disco. All other items such as personal glassware, tweezers, or plating
setup items should be stored in your personal storage areas.
3.0
Scope
4.0
Applicable
Documents
Distributor's on-line pdf manual at: http://www.elgar.com/products/DCS/downloads/DCS-E_3kW_Operation_Manual_M362295-01_RevB.pdf
5.0
Definitions
and Process Terminology
6.0
Safety
Calcium gluconate ointment is located on the right hand side of the sink. An eyewash and shower station is located in the next room next to 432c.
Please be mindful of the other users of the sink. Do not leave beakers full of HF or other acids unlabeled in the sink.
7.0
Statistical/Process
Data
8.0
Available
Process, Gases, Process Notes
9.0
Equipment
Operation
9.1
Reservations
Make reservations for either
of the plating setups: sinkplate1 for low current, on the left side, or
sinkplate2, for high current on the right.
Plating can be accomplished with the use of small or large beakers that can be obtained in the glass storage are in 432şC or checked out from the Microlab office. Otherwise the plating sink contains everything necessary to carry out electroplating.
Appropriate safety attire should be worn when using the sink (including chemical safety gloves, face shield, and apron).
A light switch is located on the lower left of the sink and controls the lights within the sink. Please turn off the light when you are finished.
9.2
Hotplate
Some electroplating setups may require the use of a hotplate
or magnetic stirrer. The hotplate located at the sink is a combination hotplate
with magnetic stirrer. To turn on first flip the switch located on the
right-hand side of the unit. Before applying heat, set the temperature set
point to the desired value by pressing the heat dial once and turning the heat
dial. A temperature probe to monitor the solution temperature is provided. When
the temperature probe is unplugged the hot plate monitors its surface
temperature. To apply heat and temperature control press and hold the heat dial
for 3 seconds. The actual temperature will be digitally displayed once
temperature control begins. Agitation is tuned by adjusting the stir dial to
the desired rate. The stir rate is also digitally displayed in revolutions
per minute (rpm).
9.3
Power Supplies and Multimeters
There are currently two
power supplies available at the station. One supply (Small HP
unit) is for lower current requirements (up to 120 mA), while the second
supply (Soresnson model) can be used for processes that require high currents
(up to 12 amps). Please refer to the Appendix of this
manual for instructions on how to set up and use the Sorenson 55-55 Model Power
Supply.
Multimeters to monitor the
current flow or voltage in electroplating setups are also available in this
cabinet.
Two breakout boxes are
available for use to connect the power supplies to the electroplating setup.
The first is located on the outside wall of the plating sink between the sink
and the cabinet with the power supplies. One may connect the power supply to
the banana inputs on this break out box. The second break out box to be used
with sinkplate2, is located on the right hand wall of the sink and may be used
to connect to the electroplating setup. These two panels of banana connectors
are matched so that the banana connectors of each are connected. One should use
these panels to electrically connect the power supply to any apparatus in the
sink. Do not directly connect the power supply to your electroplating setup as
this can result in a dangerous condition should liquid drip onto the floor or
the power supply.
9.4
Cables
Cables with banana connectors and alligator clips can
be found on the wall to the right of the sink. Please replace cables when you
are through using them. Do not leave them dangling in the sink.
9.5
Water and Aspirator
9.5.1
The deck hose supplies
DI water.
9.5.2
The aspirator is
located at the back of the sink. It can be turned on by the valve located on
the outside of the sink, just below the top deck of the sink, on the left. It
can be turned on by the red handle. The plenum flush is done automatically once
the knob has been turned and the aspirator is on.
9.5.3
N2 gas is located under
the aspirator valve.
9.6
Storage
Please store your solutions in a safe manner. HF
should be stored in the large white cabinet nest to sink 432C. Other plating
solutions may be stored underneath the sink provided there is room. Please
store any solutions in safe closed containers.
9.7
Miscellaneous
There is an electrical receptacle located next to the light switch on the lower left side of the sink. A power strip is usually plugged into the receptacle and supplies power to the power supplies and multimeters. Should the receptacle trip, reset it by pushing the reset button.
The sash should be
lowered to the level marked on the side of the sink window to allow for
sufficient exhaust velocity. Note that this enhanced exhaust velocity causes
plating solutions to evaporate faster.
9.8
Cleanup
Please leave the sink as you would like to find it (dry and clean).
Remove glassware and other plating setup items once
you are done.
10.0 Troubleshooting Guidelines
11.0 Figures and Schematics
12.0 Appendix
Sorensen
55-55 Power Supply Operational Manual
*Adapted from Sorensen DCS-E Series 3kW Power Supply
Manual
Chi Nguyen – 11/23/04
This short manual is written to highlight main operation needs of this unit in the UC Berkeley ERL-Microfabrication Lab. For full-length manual, see:
http://www.elgar.com/products/DCS/downloads/DCS-E_3kW_Operation_Manual_M362295-01_RevB.pdf
Notes regarding work area:
The Sorensen 55-55 power
supply unit is set up next to a hooded work area. The unit’s output terminals are mounted, for convenience, on a
panel on the left side of the work area, and are clearly labeled “Positive
Sorensen” for the positive terminal, and “Negative Sorensen” for the negative
terminal. There are also two extension
panels on either side of the work area for extension of load lines.
Functional Tests: Use these quick tests to verify that the power
supply is working properly.
Voltage Mode Operation
Check: Use this test to check that the unit’s internal voltmeter is
functioning accurately.
►
Turn both VOLTAGE and
CURRENT control knobs all the way to zero (counterclockwise).
►
Connect a digital
voltmeter (DVM) to the unit’s output terminals, w/ the correct polarity. Select “voltage reading” on the attached
DVM.
►
Press and hold V&I
CHECK switch for remainder of the procedure.
►
Turn CURRENT control
knob ˝-turn clockwise to increase current.
Now turn VOLTAGE control knob clockwise to increase voltage. The readings on the attached DVM and the
voltmeter display on the right side of the control panel should change.
►
Compare the attached
DVM readings to the unit’s voltmeter readings to verify that the internal
voltmeter is functioning correctly.
►
Release V&I CHECK
switch, disconnect DVM.
Current Mode Operation
Check: Use this test to check that the unit is reading current
accurately.
►
Turn both VOLTAGE and
CURRENT control knobs all the way to zero (counterclockwise).
►
Connect a digital voltmeter
(DVM) to the unit’s output terminals, w/ the correct polarity. Select “AC current reading” on the attached
DVM.
►
Press and hold V&I
CHECK switch for remainder of the procedure.
►
Turn VOLTAGE control
knob 1 or 2 turns clockwise to increase voltage. Now turn CURRENT control knob clockwise slowly to increase
current. The readings on the attached
DVM and the ammeter display on the right side of the control panel should change.
►
Compare the attached
DVM readings to the unit’s ammeter readings to verify that the internal ammeter
is functioning correctly.
►
Release V&I CHECK
switch, disconnect DVM.
Basic Operation
Before applying power to the
load, you need to set two values: maximum voltage and maximum current (Vset and
Iset). The power supply will then
operate only within the range of V < Vset and I< Iset for your
application, alternating between constant voltage mode and constant current
mode.
►
Turn both VOLTAGE and
CURRENT control knobs all the way to zero (counterclockwise).
►
Turn power supply on.
►
Press STANDBY switch to
activate standby mode.
►
Press and hold V&I
CHECK button. The voltage and current
settings should show on the voltmeter and ammeter displays on the right side of
the control panel.
►
While still holding
down the V&I CHECK button, turn the VOLTAGE control knob clockwise until
your desired voltage limit is reached.
Turn the CURRENT control knob clockwise to obtain your desired current
limit setting.
►
Release V&I CHECK
button
►
Press STANDBY switch to
get out of standby mode.
►
The unit will now apply
power to the load, w/ the constraint of your limit settings.
The Over Voltage Protection
circuit is an extra safety measure that protects the load in the event of a programming
error, an incorrect voltage control adjustment, or a power supply failure. The protection circuit monitors the output
voltage and will reduce the output current and voltage to zero whenever a
preset voltage limit is exceeded. The
preset voltage limit is also called the set point or trip level.
►
Turn the VOLTAGE
control knob all the way to zero (counterclockwise).
►
Press and hold the OVP
CHECK switch. The current OVP setting should
be displayed on the voltmeter displays on the right side of the control panel.
►
Using a small flathead
screwdriver, turn the OVP SET potentiometer above the OVP switch until the
desired OVP set point is reached.
►
Release the OVP CHECK
switch.
To reset the OVP circuit
after it has been activated:
►
Reduce unit’s output
voltage setting to below OVP set point using Vset setting procedure mentioned
above.
►
Press STANDBY switch
in, then press it again, OR turn unit power off, then on again to resume
normal operation
►
Press STANDBY switch.
►
Connect the load to the
unit using load lines of appropriate gauge and length.
o Connect the unit’s positive output terminal to the
positive load terminal, and the unit’s negative output terminal to the negative
load terminal. Use the extension panels
on the left and right side of the hooded work area if necessary.
►
Press and hold V&I
CHECK to make sure Vset and Iset are appropriate for your application. If they
are not, change them to the correct settings.
►
Press STANDBY switch
again to apply power to the load.