Rev. No.
|
Date
|
Authors
|
Description of Revision
|
|
2.1 General Cleaning Procedures
|
|
00
01
|
11/05
11/07
|
M. Kushner
M. Kushner
|
1) Edited/updated
to specify the exact sink where labware should be
cleaned.
2) Replaced
references to rinse tanks with QDR (Quick Dump Rinse) and SRD
(Spin-Rinse/Dryer).
3) Replaced Tystar
for Tylan throughout the chapter, and included the
new standby recipes names for each furnace.
1) Noted nitrite gloves rather than
the old latex gloves.
2)
Corrected
the order of chemical makeup of RCA1 and RCA2 cleans.
3)
Corrected
the hydrogen peroxide chemical formulae.
|
|
2.2 Tystar &
Lam Monitor Wafer Preparation & Rework
|
|
00
01
|
1/05
7/08
|
J. Chang
J. Chang
|
N/A
Minor revisions.
|
|
2.3 Sink3
Operation
|
|
00
01
02
|
11/02
10/05
9/08
|
K.
Chan, M. Kushner
W.
Flounders
K.
Chan
|
N/A
- Suppression
of labwide vacuum drain system to be replaced by new definition of
Full Plenum Lockout Alarm.
- Added
N2 flowmeter procedure and made minor changes.
|
|
2.4 Sink4
Operation
|
|
00
01
02
03
|
2/01
10/03
10/05
8/08
|
M.
Kushner
M.
Kushner
W.
Flounders
K.
Chan
|
N/A
N/A
- Suppression
of labwide vacuum drain system to be replaced by new definition for Full
Plenum Lockout Alarm.
- Revised
the chapter manual to match the description of sink4 in a better way.
|
|
2.5 Sink5
(Y2)
|
|
00
01
02
03
04
05
|
5/02
9/02
8/04
10/5
10/5
8/08
|
K.
Chan, M. Kushner
K.
Chan, M. Kushner
K.
Chan, M. Kushner
M.
Kushner, W. Flounders
M. Kushner
M. Kushner
|
N/A
N/A
N/A
- Addition of Section 6.9 on fire suppression
system and new definition of Full Plenum Lockout Alarm.
1)
Corrected the flash
point temperature of PRS-3000 to 90ēC.
2)
Eliminated reference
to HMDS bubbler at this sink in Section 9.5.1.5.
1) Added references to the pre-furnace
clean metal bath in Sections 3.0, 6.0, 8.0 and 9.1.
2) Deleted
any remaining references to the obsolete HMDS setup at this sink.
3) Revamped
Section 9.5 to describe the gravity drain spigot system for the PRS-3000 photoresist stripper.
4) Deleted Figure 4 (HMDS
timer).
|
|
2.6 Sink6 (MOS Clean)
|
|
00
01
02
03
|
7/03
6/04
8/04
10/5
|
M.
Kushner, K. Chan
S.
Parsa
M.
Kushner
W. Flounders
|
N/A
N/A
N/A
- Suppression
of labwide vacuum drain system to be replaced by new definition of Full
Plenum Lockout Alarm.
|
|
2.7 Sink7 (VLSI)
|
|
00
01
02
03
04
05
|
5/02
9/02
6/04
8/04
10/05
8/07
|
K.
Chan, M. Kushner
K.
Chan, M. Kushner
S.
Parsa
M.
Kushner
W.
Flounders
W. Flounders
|
N/A
N/A
N/A
N/A
- Suppression
of labwide vacuum drain system to be replaced by new definition of
Full Plenum Lockout Alarm.
- Added Wet Etching of Silicon Nitride with
Heated Phosphoric Acid info (pdf file)
|
|
2.8 Sink8 (Non-MOS Clean)
|
|
00
01
02
03
04
|
2/01
9/02
10/03
8/04
10/05
|
M.
Kushner, K. Chan
M.
Kushner, K. Chan
K.
Chan
M.
Kushner
W.
Flounders
|
N/A
N/A
N/A
N/A
- Suppression
of labwide vacuum drain system to be replaced by new definition of
Full Plenum Lockout Alarm.
|
|
2.9 Sink9 & Spin Dryer Operation
|
|
00
01
02
03
04
|
9/02
6/04
8/04
10/05
9/08
|
M.
Kushner
S.
Parsa
M.
Kusner
W. Flounders
S. Parsa
|
N/A
N/A
N/A
- Suppression
of labwide vacuum drain system to be replaced by new definition of
Full Plenum Lockout Alarm.
- Changed the purpose and
application of the sink; minor modifications.
|
|
2.10 Old Lab Sinks Operation (432C sink & black
utility sink)
|
|
00
01
02
|
7/04
11/06
6/07
|
M.
Kushner
W.
Flounders
M.
Kushner
|
N/A
- Modified Section 8.0.
- Modified Sections 8.1, 8.2 and 9.1.
|
|
2.11 Sink 432A (Old Lab)
|
|
00
01
|
9/02
10/05
|
M. Kusner
R. Hamilton
|
N/A
- Deletion of paragraph 6.7 in 6.0 Safety
about fire supression system.
|
|
2.12 Sinkplate -
Electroplating
|
|
00
01
02
03
|
4/01
7/03
12/04
6/07
|
J. Chang
D. Meir
S. Parsa,
P. Guillory
D. Queen
|
N/A
N/A
N/A
- Removed references to gooseneck and ICW supplies as they are no
longer available at the sink.
- Updated the location of the HF chemical
cabinet.
|
|
2.13 Tousimis 815
Critical-Point Dryer (small samples)
|
|
00
01
02
03
04
05
|
6/01
9/03
9/04
9/05
7/07
7/07
|
M. Young
R. Su
R. Hamilton, W. Flounders
M. Linan
W. Flounders
T. Fujii
|
N/A
N/A
N/A
- Addition of Section 3.3 in Scope
- Added same paragraphs in 10.0
Troubleshooting Guidelines, than in Chapter 2.14 (cpd)
- Reviewed No changes necessary.
|
|
2.14 Tousimis 915B
Critical-Point Dryer
|
|
00
01
02
03
04
05
06
|
5/00
6/01
7/03
9/04
5/05
7/07
8/07
|
J. Chang
M. Young, M.
Helmbrecht
W. Flounders
W. Flounders, R. Hamilton
M. Linan
W. Flounders
M. Tien
|
N/A
N/A
N/A
N/A
N/A
- Added subsection 10.2 in Section 10.0
Troubleshooting Guidelines (same paragraphs as in 2.13)
- Added
sentence in 9.2.7, Subsection 10.3, and corrected few typos.
|