Rev. No.
|
Date
|
Authors
|
Description of Revision
|
|
2.1 General Cleaning Procedures
|
|
00
01
02
|
11/05
11/07
8/09
|
M. Kushner
M. Kushner
R. Chen, M. Kushner
|
1) Edited/updated
to specify the exact sink where labware should be cleaned.
2) Replaced
references to rinse tanks with QDR (Quick Dump Rinse) and SRD
(Spin-Rinse/Dryer).
3) Replaced Tystar for Tylan throughout the
chapter, and included the new standby recipes names for each furnace.
1) Noted nitrite gloves rather than the old
latex gloves.
2)
Corrected the
order of chemical makeup of RCA1 and RCA2 cleans.
3)
Corrected the
hydrogen peroxide chemical formulae.
- Replaced tylan to
tystar and renumbered tystars in 6.1, 6.3.8-9, 6.4.6.
|
|
2.2 Tystar & Lam Monitor Wafer Preparation &
Rework
|
|
00
01
|
1/05
7/08
|
J. Chang
J. Chang
|
N/A
Minor revisions.
|
|
2.3 Sink3
Operation
|
|
00
01
02
|
11/02
10/05
9/08
|
K.
Chan, M. Kushner
W.
Flounders
K. Chan
|
N/A
- Suppression
of labwide vacuum drain system to be replaced by new definition of
Full Plenum Lockout Alarm.
- Added
N2 flowmeter procedure and made minor changes.
|
|
2.4 Sink4
Operation
|
|
00
01
02
03
04
|
2/01
10/03
10/05
8/08
11/08
|
M. Kushner
M.
Kushner
W.
Flounders
K. Chan
W. Flounders
|
N/A
N/A
- Suppression
of labwide vacuum drain system to be replaced by new definition for
Full Plenum Lockout Alarm.
- Revised
the chapter manual to match the description of sink4 in a better way.
- Added
safety sentence about hotplates in Y1.
|
|
2.5 Sink5
(Y2)
|
|
00
01
02
03
04
05
|
5/02
9/02
8/04
10/5
10/5
8/08
|
K.
Chan, M. Kushner
K.
Chan, M. Kushner
K.
Chan, M. Kushner
M.
Kushner, W. Flounders
M. Kushner
M. Kushner
|
N/A
N/A
N/A
- Addition of Section 6.9 on fire suppression
system and new definition of Full Plenum Lockout Alarm.
1)
Corrected the flash point
temperature of PRS-3000 to 90ēC.
2)
Eliminated reference to HMDS
bubbler at this sink in Section 9.5.1.5.
1) Added references to the pre-furnace
clean metal bath in Sections 3.0, 6.0, 8.0 and 9.1.
2) Deleted
any remaining references to the obsolete HMDS setup at this sink.
3) Revamped
Section 9.5 to describe the gravity drain spigot system for the PRS-3000
photoresist stripper.
4) Deleted Figure 4 (HMDS
timer).
|
|
2.6 Sink6 (MOS Clean)
|
|
00
01
02
03
04
|
7/03
6/04
8/04
10/5
9/08
|
M.
Kushner, K. Chan
S.
Parsa
M.
Kushner
W. Flounders
M. Kushner
|
N/A
N/A
N/A
- Suppression
of labwide vacuum drain system to be replaced by new definition of
Full Plenum Lockout Alarm.
- Expanded
the section on sink-6 protocols, Section 8.3. Removed the reference to the
old sink6 from Section 9.0 - Sink Operation.
|
|
2.7 Sink7 (VLSI)
|
|
00
01
02
03
04
05
06
|
5/02
9/02
6/04
8/04
10/05
8/07
8/09
|
K.
Chan, M. Kushner
K.
Chan, M. Kushner
S.
Parsa
M.
Kushner
W.
Flounders
W. Flounders
L. Petho
|
N/A
N/A
N/A
N/A
- Suppression
of labwide vacuum drain system to be replaced by new definition of
Full Plenum Lockout Alarm.
- Added Wet Etching of Silicon Nitride with
Heated Phosphoric Acid info.
- Minor editing throughout the text
|
|
2.8 Sink8 (Non-MOS Clean)
|
|
00
01
02
03
04
|
2/01
9/02
10/03
8/04
10/05
|
M.
Kushner, K. Chan
M.
Kushner, K. Chan
K.
Chan
M.
Kushner
W. Flounders
|
N/A
N/A
N/A
N/A
- Suppression
of labwide vacuum drain system to be replaced by new definition of
Full Plenum Lockout Alarm.
|
|
2.9 Sink9 & Spin Dryer Operation
|
|
00
01
02
03
04
|
9/02
6/04
8/04
10/05
9/08
|
M.
Kushner
S.
Parsa
M.
Kusner
W. Flounders
S. Parsa
|
N/A
N/A
N/A
- Suppression
of labwide vacuum drain system to be replaced by new definition of
Full Plenum Lockout Alarm.
- Changed the purpose and
application of the sink; minor modifications.
|
|
2.10 Old Lab Sinks Operation (432C sink & black
utility sink)
|
|
00
01
02
|
7/04
11/06
6/07
|
M.
Kushner
W.
Flounders
M.
Kushner
|
N/A
- Modified Section 8.0.
- Modified Sections 8.1, 8.2 and 9.1.
|
|
2.11 Sink 432A (Old Lab)
|
|
00
01
02
|
9/02
10/05
9/08
|
M. Kusner
R. Hamilton
D. Queen
|
N/A
- Deletion of paragraph 6.7 in 6.0 Safety
about fire supression system.
- Added bases to the list of chemicals that can be
aspirated.
|
|
2.12 Sinkplate - Electroplating
|
|
00
01
02
03
|
4/01
7/03
12/04
6/07
|
J. Chang
D. Meir
S. Parsa, P. Guillory
D. Queen
|
N/A
N/A
N/A
1) Removed references to gooseneck and ICW
supplies as they are no longer available at the sink.
2) Updated the location of the
HF chemical cabinet.
|
|
2.13 Tousimis 815 Critical-Point Dryer (small samples)
|
|
00
01
02
03
04
05
06
|
6/01
9/03
9/04
9/05
7/07
7/07
10/09
|
M. Young
R. Su
R. Hamilton, W. Flounders
M. Linan
W. Flounders
T. Fujii
S. Parsa
|
N/A
N/A
N/A
- Addition of Section 3.3 in Scope
- Added same paragraphs in 10.0 Troubleshooting
Guidelines, than in Chapter 2.14 (cpd)
- Reviewed No changes necessary.
- Added Important
Note at end of Section 8.0 and new
subsection 9.1.3.
|
|
2.14 Tousimis 915B
Critical-Point Dryer
|
|
00
01
02
03
04
05
06
07
08
|
5/00
6/01
7/03
9/04
5/05
7/07
8/07
10/08
10/09
|
J. Chang
M. Young, M.
Helmbrecht
W. Flounders
W. Flounders, R. Hamilton
M. Linan
W. Flounders
M. Tien
M. Linan
S. Parsa
|
N/A
N/A
N/A
N/A
N/A
- Added subsection 10.2 in Section 10.0
Troubleshooting Guidelines (same paragraphs as in 2.13)
- Added
sentence in 9.2.7, Subsection 10.3, and corrected few typos.
- Added
schematics of cpd plumbing (11/7/07)
- Added Important Note at end of Section 8.0 and new subsection 9.1.3.
|