Chapter 3.3

GCA 3600F Pattern Generator

(gcapg)

1.0        Introduction

1.1        Functional Description

The GCA 3600 Pattern Generator is a fully automatic  system that generates patterns on high-resolution emulsion plates, as well as photoresist-coated chrome and iron oxide plates. The  operating  parameters used to generate the pattern are specified via the gcapg PC (personal computer)  from  input data  created from the graphic layout of the mask set using the kic or vem graphics editor.

1.2        System Specifications

►     Mask sizes:

-         2.5", 4”, 5" and 7” chrome  plates,

-         2.5” and 5” emulsion plates,

-         5” iron oxide plates,  and

-         6” quartz plates 

are  stocked  by  the Microlab  and are in inventory at all times.

►     Mask thicknesses:   

-         .090 mils for 2.5”, 4”, 5” and 7” plates (standard thickness)

-         .120 mils for 6” quartz plates (standard thickness)

Note:    Industry standard is .25 mils, which can also be processed in the Microlab.     

►     Mask types: chrome, emulsion, iron oxide (HP compensator  set  to  work piece  coefficient 8.1), quartz (used only for the ASML stepper) (HP compensator  set  to  work piece coefficient 0.5).

►     Stage position velocity: 50 mm/sec

►     Stage placement units: English or metric

►     Stage placement least control: 0.04 ΅m X-Y

►     Stage placement accuracy: 0.1 ΅m

►     Stage placement data input: 0.1 ΅m

►     Rectangular aperture setting in mask units: 2-1500  ΅m in 2997 increments

►     Aperture to stage parallelism: 0.12 ΅m/1.5 mm length

►     Accuracy of apertures: < 0.35 ΅m between 2-125   (our accuracy is ~ 0.1 ΅m)

►     Rotational capability: 0-89.9 degrees  in  0.1 degree increments

Note:    The software allows minor ± correction factors to be entered, to eliminate hairlines on butting patterns.

2.0        Operating Procedures

2.1    The Command Set

The first command to the system after  a  reboot  is  MODE, which  defines  the  conditions  for operating the GCA 3600 Pattern Generator.

Note:    The power switch on the PDP11 (DC on/off) is now used only  for  powering  the  system down when changing out the mercury arc lamp, and then  powering  the  system  back  up again when the lamp change is completed.

Rebooting the computer:

Strike the CNTRL/ALT/DEL keys all  together  to  start  the computer reboot. During the computer reboot, the following occurs:

a)      the configuration is checked;

b)      the memory is checked;

c)      the networking software is loaded up.

When the reboot procedure is completed, it goes  back  into the OSPREY program.

On the screen you will see:

3600F 47 Pattern Generator

Version D09.03  Variant

Created 09:31  06-JUN-86

MO/DY/YR     HR:MI   (enter the date and time with this format)

After the date and time is entered, the reboot is complete.

The next step is to define the operating conditions for the pattern generator in MODE.

MODE initiates a dialogue to define the units  of  measurement,  the  "tape"  format,  the  type of exposure, and the method of changing plates. MODE should always be checked to verify the proper specifications for your job.

For example:

MODE (press enter key)

Tape format: 1 (for the GCA 3600 format)

Unit of measurement: Metric or English?  M  (metric)

Exposure type:  F (flash for emulsion plates)

           S (for chrome or iron oxide plates)

Plate change Mode: M (manual)

 The following command set commands can only be entered when in DOS:

SP (setup): Initiates a dialogue to enter or edit  the specification  of  a  job  in the queue. If "SP #1" is specified, the first job is opened for editing.

LQ (list queue): Displays the  job  specifications  in the mask queue for verification

RQ (run queue): Automatically originates the stage and moves  it  to the plate loading position.  RQ runs the jobs on the pattern  generator  as  described  in  the queue.

e.g. RQ #1 will start the first job in the queue.

CQ * (clear queue): Erases the entire queue (stored in the computer memory).  Use this command when you are finished with your mask-making.

If you only want to erase one job, the use the command CQ  #1,  or the number of whichever job you would like to delete.

2.2        Operator Keyboard Controls 

A set of  keyboard  control functions  allows  the  user to correct typing errors, halt the execution of a job in progress, and  query  the  system for job status reports.

DELETE

Depressing the  delete  key  on  the  system  keyboard removes the last character typed.  Two DELETES removes the last two characters, etc.

CTRL/Q

Striking the CTRL/Q keys together aborts the job  command  underway  and  returns to the system prompt. The user can then type another command.

CTRL/P

Striking the CTRL/P keys together reports  the  status of the job.

CRL/C

Striking the CTRL/C keys together interrupts the  execution  of  the command in progress.  This command can be useful in preventing characters from scrolling  off the monitor screen.

Note:    During all other commands except RQ, if the message "type C  to  continue"  is  displayed  on  the screen, the system pauses until "C" is typed.

2.3        Tableau Controls

The MODE and SP (setup)  commands  display  tableaux  of questions  for the operator to answer.  On the PC terminal, a cursor indicates the line to be answered.  Special  function   keys   manipulate   the   cursor.   These  keys  are represented by up/down//right arrow keys. [Enter] indicates the carriage return key.

[enter]     A carriage return enters the operator response and advances the cursor one  line. In the absence of an explicit response, the default response is entered.

V            The down-arrow key advances the cursor one line.  If a response  has  been  typed, it will be entered; otherwise, the line is unchanged.

^            The up-arrow key returns the cursor  to  the  previous line.

→          The right-arrow key displays  allowable  responses  to the  active  line.   These  explanatory messages  are displayed to the right of the associated queries.

3.0        The GCA Pattern Generator PC (Personal Computer)

The gcapg's PC computer name on the campus network is: gcapg.eecs.berkeley.edu

3.1        Converting Mann Files to Pattern Generator  Files  using m36gen

With respect to what is on argon:

a)     Create a subdirectory called  "masks"  directly  below your home directory (use lowercase letters).

b)     This subdirectory must be readable and  executable  by the world, but it should only be writable by you.

c)      The pattern generator files must be world readable.

3.2        UNIX and DOS File Names

It is important to note the difference between UNIX and DOS file names.  It is suggested that all UNIX files that will be copied or transferred to the gcapg PC be less than eight characters, with the extension being three characters or less; these are DOS conventions/restrictions.

* CAUTION *

Never use the wildcard symbol * for any part of a filename because deleting a job with the wildcard symbol will delete everything!

It is also suggested to use lowercase letters for your UNIX files  and  directory  names since PC-NFS software maps all UNIX lowercase characters  to  uppercase  letters  in  DOS. Mixed  case characters in UNIX will cause more unusual mapping to DOS using PC-NFS.

3.3        The GCA Pattern Generator Computer

The gcapg (computer) is  an  insecure  computer,  and  from argon's point of view, the gcapg accesses files on argon as an unprivileged user.  In order to access the pattern generator  files, the directory or subdirectory where the pattern generator files are located in your argon account must be world readable and executable.

To prevent anyone else using the gcapg  from  modifying  or deleting your argon files, the subdirectory should be writable by you only.  By default, accounts on argon  will create such directories.

3.4        Converting Mann Files to Pattern Generator  Files  using m36gen

 An example follows:

Assume you have a mann file called  "active.mann"  and  you want  the  pattern  generator  files  to  be "actv.tap" and actv.tix".

►     TAP emulates the tape

►     TIX means translation index

From argon, type:

m36gen -T actv active.mann (for the GCA wafer stepper)

or with the centering option:

m36gen -c 0 0 -T actv active.mann (for the quintel  or canon)

(Press the return key to continue.)

On your terminal screen you will next see the following:

m36gen -T new filename  mann_file

Two new DOS files written in EBCDC will be created in  your current directory:

newfilename.TAP and newfilename.TIX

Warning:    Using  the  centering  option  will  individually center each layer and change the coordinates of your alignment mark(s).

Abort this execution of m36gen (n)? :

Hit return key when you are ready:

Writing the directory

X_trans: -250000   Y_trans: -250000

Starting layer ACTV

This layer contains 816 flashes

Done!

 Note:   The number of lines per layer in your  mann  file  is equivalent  to  the number of flashes it will take the pattern generator to complete your job. The pattern  generator flashes approx. 6,000 flashes per hour (slightly higher for emulsion).  Therefore, if you submit a job that  has  6,000 flashes, it will take one hour of gcapg machine time.

You  now  have  two  new  files   called   "actv.tap"   and "actv.tix".

Move these two pattern generator files into your  subdirectory "masks".

e.g.   mv actv.tap  ~masks

        mv actv.tix  ~masks

 Change into your "masks" directory  and  make  these  files world readable by doing the following:

chmod a+r actv.tap

chmod a+r actv.tix

(If you forget to do so, you will not be able to copy these files over to the pattern generator PC.)

Note:    If you are submitting an online mask request form, do so now:

http://microlab.berkeley.edu/text/maskmaking.html

3.5        Going into DOS at the gcapg PC

Enable the gcapg on the WAND.

At the prompt >> press  the ALT/C keys together. This  will bring up the

CoProcessor- Control Menu

0-- Core dump

2-- Reboot CoProcessor

3-- Continue to ODT mode

4-- Abort program and return to DOS

5-- Select new file container for disk

Always choose option 4-- Abort program and  return  to  DOS (use the up/down arrow keys to move up or down the menu)

Hit the "enter" or "return" key.

C:\JOBDATA> will appear on the screen

Note:    JOBDATA is the directory where everything resides.

Next, you will need  to  change  over  to  the  appropriate drive.

Network drives are now as follows:

P: lab user home directories

S: lab staff home directories

To change the drive:

C:\JOBDATA>P:

Assuming the pattern generator files  are  located  in  the account  "michael"  and in the subdirectory masks and the PC has already been changed to the directory, the PC  monitor screen will show:

P:\MICHAEL\MASKS>

Next, copy your TAP and TIX files from this argon subdirectory to the gcapg PC by typing the following at the prompt:

P:\MICHAEL\MASKS> COPY ACTV.TAP C:

(it will tell you) 1 file(s) copied

P:\MICHAEL\MASKS> COPY ACTV.TIX C:

(it will tell you) 1 file(s) copied

P:\MICHAEL\MASKS> (type in) C:

The JOBDATA prompt will show on the screen:

C:\JOBDATA> (type in) OSPREY  [enter]

After you type in OSPREY, the screen will show:

3600F 47 Pattern Generator

Version D09.03   Variant:

Created: 09:31   06-JUN-86

ENTER MO/DY/YR  HR:MIN

 e.g. 07/01/06  9:00 (enter current date and time)

TIME: 09/04/01    9:00    COMP: 7293

>> 

At the >> JOBDATA prompt, it's a good  time  to  check  the MODE  parameters.   Each  time  the  OSPREY program is restarted, "F" (for flash) is the default it returns to.

MODE

TAPE FORMAT: 1

METRIC/ENGLISH: M

FLASH/SHUTTER/LASER: F (for emulsion) S (for chrome or iron oxide)

APC/MANUAL PLATE CHANGE: M

EXECUTE OPTION:

1. SAVE AND EXIT

2. QUIT

Always choose option "1. SAVE AND EXIT".

The MODE parameters, time and  date  are  repeated  on  the screen in this format:

MODE: 1   M   F   M

Time: 07/01/06    9:00   COMP: 7294

3.6        The Job Setup (SP)

You will now be ready to setup (SP) your job(s). Depressing the ALT/F keys together will bring up the

FILE TAPE CONTROL MENU

0--Continue

1--Close file

2--Rewind tape

3--Open new file

4- Toggle write protect

Tape filename: GCA.TAP (default TAP file)

Current Object: 0

User Protect: Off

File Protect: Off

Status message: None

Arrow down to:

3--Open new file  [enter]

After this option is chosen,  additional  linersi  will  be added to the end of the above menu:

ENTER NEW FILE: e.g. ACTV.TAP

The status message will change to:

STATUS MESSAGE: FILE OPENED

and the tape filename will change to:

TAPE FILENAME: e.g. ACTV.TAP

The 0--Continue line will be  highlighted  on  the  screen; press the [enter] key to continue.

Next, list your files, using the command  "LF"  at  the  >> prompt

>> LF

Listing MT

PLUTO ACTV .T01 0000

Time: 07/01/06  9:00   Comp: 7294

Note:    If you have transferred your files from a pluto  terminal, then "pluto" will appear in front of your mask layer name.

>>SP [enter]

File name: e.g. #1

Flash Intensity: use current posted value (updated monthly)

 Execute option: 3

1. Add to queue

2. Replace item:

3. Go to page: 2

4. Quit

On page 2, add in the height and width correction factor:

H: 0.0005     W: 0.0000

(arrow down to end of page 2)

Execute option: 3 [enter]

Go to page: 3 [enter]

On page 3, enter the following:

Change plate? Y [enter]

Plate size (MM)       X: 60.5 (for 2.5" plates)

                           Y: 60.5 (for 2.5" plates)

                           X: 98.6 (for 4" plates)

                           Y: 98.6 (for 4" plates)

                           X: 125 (for 5" plates)

                           Y: 125 (for 5" plates)

                           X: 150 (for 6” plates)

                           Y: 150 (for 6” plates)

                           X: 165 (for 7” plates)

                           Y: 165 (for 7” plates)         

Fiducial: enter "D" for gcaws masks only

Closure test: answer "Y"  [enter]

At X: 27 (for 2.5" plates)

At Y: 27 (for 2.5" plates)

At X: 45 (for 4" plates)

At Y: 45 (for 4" plates)

At X: 55 (for 5" plates)

At Y: 55 (for 5" plates)

At X: 65 (for 6” plates)

At Y: 65 (for 6” plates)

At X: 72 (for 7” plates)

At Y: 72 (for 7” plates)

Execute option: 3

Go to page: 4   [enter]

On page 4 you will fill in the mask label if desired.

Label: e.g. ACTV  7/06 (plus your login name  or  initials)

With date and time? (N) or (Y) (your option)

On plate side: +X (this is the default answer always)

At distance from center:      27 (for 2.5" plates)

                                      45 (for 4" plates)

                                      55 (for 5" plates)

                                      65 (for 6” plates)

                                      72 (for 7΄plates)

 Execute option: 1

1. Add to queue [enter]

Last item: 01

Set up another job? (Answer "Y" or "N") [enter]

Time: 02/22/96   9:00   Comp: 7294

>> 

 At this prompt, type "LQ" to list your jobs  in  the  queue and to verify that all the entered values are correct.

To start your job run, type:

>>RQ 1  (or RQ 2, RQ 3, etc)

Load plate ...[CR]: [enter]

Note:    See Appendix II for ASML plate specifications.

The job should start running at once; if you have any data errors in the X-Y range, the job will be kicked out at this point.

To check the status of your job, press the   "CTRL/P"  keys together;  this  will  tell  you how many flashes have been made and the elapsed time.

When your job is completed, clear the queue by typing:

"CQ" and the job number, e.g., "CQ 1".

You can also clear the entire job queue by typing "CQ *".

Next, return to the OSPREY prompt to delete your files from the  memory;  this is necessary so that the disk space does not fill up.

Press the ALT/C keys together to return to the Co-Processor Control Menu.

Select option 4: Abort program and return to DOS.

C:\JOBDATA> (type in) C:

On the screen you will see:

C:\JOBDATA>

Delete your "TAP" and "TIX" files now. e.g.,

C:\JOBDATA> DEL ACTV.TAP

C:\JOBDATA> DEL ACTV.TIX

Disable the pattern generator on the WAND. Make  sure  you have  checked out all your materials. The materials "ckout" list is posted by the terminal in R1.

APPENDIX I

New Procedure Mask-Making Checklist

(updated monthly)

a)           Determine the mask size and type:

►     Chrome and iron oxide masks  are  coated  with  photoresist and use the mercury arc lamp and shutter.

►     Emulsion masks use the xenon flash assembly.

b)           Determine which light source is needed:  mercury  arc lamp or the xenon flash.

c)           Set the focus:

Emulsion: 236

Chrome: 111

Iron oxide: 121

d)           Set the stage control switch (on the  PG  computer panel)  to  either  the resist (for chrome or iron oxide) or emulsion (for emulsion) setting.

e)           Load the mask, securing it with the vacuum  toggle switch  inside  the  PG  chamber. The vacuum gauge should read "10" when the plate is securely  held. If not, reposition the plate.

f)             When setting up your job queue, determine if fiducial marks on the mask are necessary.

►     Masks made for the GCA Wafer Stepper use the "D" fiducial.

►     Masks for the quintel, ksaligner and canon, use none.

 

CURRENT JOB PARAMETERS

(updated monthly)

 Chrome:

Exposure time: 190 (increase to 200 for clear fields)

Focus: 111

Mode: "S" (shutter)

Iron Oxide:

Exposure time: 165

Focus: 121

Mode: "S" (shutter)

Emulsion:

Exposure time (for aptemulsion developer): 13

Focus: 236

The job setup at the  PG   computer  consists  of  four pages:

Page 1: Fill in the exposure time or flash intensity

Page 2: Add in the height and width correction:

H: 0.0005  W: 0.000

Page 3: Fill in the plate size:

60.5 for 2.5" plates

98.6 for 4" plates

125 for 5" plates

150 for 6” plates

165 for 7” plates

Fiducial: D (for the wafer stepper)

Answer "Y" for closure test.

At X:     55 (default value for 5" plates)

           27 for 2.5" plates

At Y:     55 (default value for 5" plates)

           27 for 2.5" plates

For 4" plates:    At X:     45

                      At Y:     45

For 6” plates:    At X:     65

                      At Y:     65

For 7” plates:    At X:     72

                      At Y:     72 

Page 4: Label your plate as desired.

Date and time: optional, answer "Y" or "N"

At distance from center:   27 for 2.5" masks