Chapter 3.4

APT Emulsion Process

(aptemul)

1.0 Title

APT Emulsion Process

2.0 Purpose

The APT Emulsion Developer is an automated photomask processing unit for emulsion masks which have been exposed in the pattern generator.

3.0 Scope

This chapter describes the emulsion process used in the APT emulsion unit on the right. The programs to which we refer in this manual are listed in Section 9.3. Please note that sink12 must be enabled when using the APT. The aptemul mask developer accommodates masks in the following sizes: 2.5”, 4”, 5”, 6” and 7”.

4.0 Applicable Documents

Revision History

5.0 Definitions and Process Terminology

6.0 Safety

Before you proceed, please note the following: the aptemul chemical tubings should always be kept immersed in solution to avoid spraying air onto the plate instead of the desired chemical. The door to the process chamber should be kept closed and latched at all times except when loading or unloading masks.

7.0 Statistical/Process Data

8.0 Available Process, Gases, Process Notes

9.0 Equipment Operation

► Enable the aptemul on the Wand. Press the round green power button to turn on the system power.

► Open front panel.

► Put the colored tubings from the beakers into the required premixed chemical bottles and cap them tightly. Refer to the Program listings in Section 9.3 to determine which chemicals you will need, and to the table below to see the tubing assignments for each chemical.

Tubing Color	Chemical
Green	PD-86 (premixed) Negative Developer
Orange	Kodak Rapid Fixer
Blue	Methanol
White	D.I. Water (main supply)

Developers age when exposed to light or air, so cap tightly and keep the front panel of the aptemul closed. If the PD-86 developer appears to be discolored, discard whatever is left in the bottle and replace it with a fresh bottle (Cabinet #3, in the lobby, on the bottom shelf.)

9.1 Checking Chemical Lines

Before starting your process, you will run a test program (Program 82 - Negative Process Test) to check that each chemical is flowing properly at each step. These programs are set up to allow each required chemical to spray in sequence, with water rinses in between. Program 82 is listed in Section 9.3.

9.1.1 Enter test Program 82.

9.1.2 Press START/RESUME button.

9.1.3 When the program starts, make sure that the desired chemical starts to spray out of its respective nozzle. The chemical(s) should dispense from the nozzle(s) as a fan-shaped spray. When it has been spraying for 30 seconds, press SKIP button. This will advance the program to its next step, which is a DI water rinse.

9.1.4 Let the water rinse cycle run through (30 seconds). The next chemical should then begin to spray. Once it has been spraying 30 seconds, press SKIP again to start a water rinse. Continue in this way until you have worked your way through the program. If too much water beads up on the window and prevents you from being able to see through, press the HOLD button near the end of a water cycle. Open the window and wipe it dry with a Techni-cloth to clear it. Techni-cloths are kept in a dispenser on top of the aptchrome. Press the START/RESUME button to continue the cycle. To go back to a given step, press the ABORT button and then the SKIP button until you reach the desired step, then press START/RESUME. Continue in this way until you have checked the process parameters of the entire program. The lamp is on all the time on the test programs and the pump rinse programs.

9.1.5 If everything checks out, proceed to Section 9.2. If there is a problem, ask the process staff for help and post the problem on Faults. Note: There is a new feature at the aptemulsion: a holding tank for the rapid fixer effluent. EH&S will no longer permit the Microlab to have the Kodak Rapid Fixer go down the sink drain after the fix step (Programs 82 and 2). In the service chase CR1, behind the APTs, there is now a holding tank for this waste. When the holding tank is full, two small orange warning lights (indicated at Input1 and Input 2A) will go on. Until this tank is drained (by the aptemul technician), NO RAPID FIXER IS DISPENSED THROUGH THE LINE. Although the tank level will be checked weekly by the process staff, it will be required by each qualified user to check for the warning lights before enabling and operating this piece of equipment.

9.2 Developing Masks: Red Lights ON in R1 and R2!

Note: Before developing your first plate, run Program 2 through 1X to insure all lines are clear.

9.2.1 Load mask, emulsion side up, onto the spinner, seating all 4 corners securely so that it does not fly off and break during spin.

9.2.2 Close and latch sliding window and enter Program 2 - Negative Process.

9.2.3 Press START.

9.2.4 When the process is finished, check to see if the plate is completely dry. If not, blow it dry with the antistatic N2 gun in R2 mounted at the pattern generator chamber.

9.2.5 When you have finished processing your masks, open the front panel. Check whether the beakers are filled to the top with DI water. The deck hose at sink12 has a curly cord long enough to reach the aptemul. Please refill when the beakers are less than half full.

9.2.6 Put tubing back into the designated beakers and recap the chemical bottles.

9.2.7 Run Program 92 to rinse out the process pumps and prevent damage to them.

9.2.8 When the entire cycle for Program 92 is finished, open the window, use the deck hose at sink12 to rinse the chamber.

9.2.9 Close and latch the window and run Program 93 to water rinse it for 30 more seconds.

9.2.10 Use a techni-cloth to wipe the interior of the window. Disable the aptemul on the Wand.

IMPORTANT: Rinse out the methanol pump immediately with water after use, or the pump will fail after the vapor pressure of the methanol builds up and swelling occurs inside the pump.

Never change programs that are listed on the instructions sheets or the programs, which are locked.

9.3 Programs

Program 82 – Negative Process Test

Step	Chemical	Output	Description	Time (sec.)
1	PD-86 (premixed)	4	Developer 1	100
2	Water Rinse	7	Rinse Nozzle	30
3	Kodak Rapid Fixer	2	Fixer	100
4	Water Rinse	7	Rinse Nozzle	30
5	Methanol	5	Methanol	100
6	Water Rinse	7	Rinse Nozzle	30

Program 2 – Negative Process

Step	Chemical	Output	Description	Time (sec.)
1	Water Rinse	7	Rinse Nozzle	10
2	PD-86 (premixed)	4	Developer 1	80
3	Water Rinse	7	Rinse Nozzle	45
4	Kodak Rapid Fixer	2	Fixer	60
5	Water Rinse	7	Rinse Nozzle	45
6	Water, Methanol	5 or 7	Methanol/Rinse Nozzle	30
7	Methanol	5	Methanol	30
8	Spin Dry	-	Spindry	120

Program 92 – Negative Process Pump Rinse

Step	Chemical	Output	Description	Time (sec.)
1	PD-86 (premixed)	4	Developer 1	30
2	Water Rinse	7	Rinse Nozzle	30
3	Kodak Rapid Fixer	2	Fixer	30
4	Water Rinse	7	Rinse Nozzle	30
5	Methanol	5	Methanol	30
6	Water Rinse	7	Rinse Nozzle	30

Program 93 – Water Rinse

Step	Chemical	Output	Description	Spin Speed (10^3 RPM)	Time (sec.)
1	DI Water Rinse	7	Developer 1	.22	30
2	Spin Dry	Lamp	Spindry	.95	120

10.0 Troubleshooting Guidelines

11.0 Figures and Schematics

12.0 Appendices

12.1 How To Make Up a New Batch of Rapid Fixer

12.1.1 First, take the nearly empty bottle of rapid fixer out of the aptemul chamber and over to the sink 12 deck (wear appropriate safety gear).

12.1.2 Next, discard the remaining fixer at sink 12 and rinse out the bottle.

12.1.3 The second C-locker (R1 C-locker #2) in the red room is where another package of Kodak Rapid Fixer can be found; if not, check the blue developer cabinet - it's in a brown cardboard box on the bottom shelf.

12.1.4 Fill the now empty glass 1-gallon bottle halfway with DI water, then add Solution "A" to the bottle. Next, add Solution "B" (hardener). Recap the bottle tightly and agitate the solutions so that they mix well.

12.1.5 Finish up by adding more DI water to the shoulder of the bottle. It will be slightly foamy, so add the water slowly. Return the bottle to the aptemul chamber.

Note: The solution MUST be covering the tubing in the bottle at all times; when it does not, it's time to make up a new batch.

12.2 Processing Menu