Chapter 6 - Thin Film Systems

6.0 Sputterers

6.01 Hummer Sputtering System (for SEM samples ONLY)

6.02 Novellus m2i Sputtering System

6.03 Randex System

6.04 CPA Sputtering System

6.05

6.06

6.07 Edwards Auto 306 DC and RF Sputter Coater

6.08 AMS Aluminum Nitride

6.10 Evaporators

6.11 NRC Evaporator

6.12 Veeco 401 Vacuum System

6.13

6.14 Edwards EB3 Electron Beam Evaporator

6.15 ULTEK E-Beam Evaporator

6.16

6.17

6.20 CVD Thin Films

6.21

6.22 Parylene Deposition System 2010 Labcoter 2

6.23 ASMT Molecular Vapor Deposition System MVD100

6.24 Picosun Atomic Layer Deposition (ALD)

6.25

6.25

6.26

6.27

6.28 P5000 MOS/Non-MOS Clean TEOS PECVD and ThCVD Systems (4” and 6”)

6.29 Oxford Plasmalab 80plus PECVD System

6.30 Plasma Quest ECR PECVD System

6.31 Ion Beam Deposition System (4” and 6”) (ionmill) - Moved to Marvell Nanofabrication Lab