Chapter 7 - Etching Systems

7.0 Lam Etchers Overview

7.1 Lam1 Silicon Nitride Etcher

7.2 Lam2 Oxide Autoetcher

7.3 Lam3 Aluminum RIE Etcher

7.4 Lam4 Poly-Silicon Rainbow Etcher

7.5 Lam5 Poly-Si TCP Etcher

7.6 Centura^® MxP+ Chamber

7.7 Centura^® Deep Silicon Etch DPS-DT

7.8 STS Poly-Si ICP Etcher

7.9 Plasma-Therm Parallel Plate Etcher

7.10 Oxford RIE System (Restricted to CCH Group)

7.11 Technics C Plasma Etching System

7.12

7.13 Xenon Difluoride Etching System

7.14 Ion Beam Milling with the Veeco Microetch System

7.15 Hfvapor (Idonus HF VPE-100 / 150)