Chapter 7 - Etching Systems

7.0     Lam Etchers Overview

7.1          

7.2         Lam2 Oxide Autoetcher

7.3         Lam3 Aluminum RIE Etcher

7.4         Lam4 Poly-Silicon Rainbow Etcher

7.5         Lam5 Poly-Si TCP Etcher

7.6         Centura® MxP+ Chamber

7.7         Centura® Deep Silicon Etch DPS-DT

7.8         STS Poly-Si ICP Etcher

7.9         Plasma-Therm Parallel Plate Etcher

7.10      Oxford RIE System (Restricted to CCH Group)

7.11      Technics C Plasma Etching System

7.12      Centura® Metal Chamber

7.13      Xenon Difluoride Etching System

7.14      Ion Beam Milling with the Veeco Microetch System

7.15      Hfvapor (Idonus HF VPE-100 / 150)