Chapter 8.24
Memscope
(Microscope
with Image Capturing Capability)
1.0
Title
Memscope
Operation
2.0
Purpose
This document has specific information about the Memscope, a Leica
INM200 microscope with magnifying power up to 100x, and equipped with a
frame-grabber video camera.
3.0
Scope
The Memscope is a Leica INM200 optical microscope equipped with 5x, 10x,
20x, 50x, and 100x objectives, a frame-grabber video camera, and
controlled by an ErgoPlan control panel plus joystick and theta knob for its
motorized stage. Images can be captured as JPEG files using the connected
windows PC and saved to the media of choice (CD, Zip, USB, or network
device). This microscope can do both bright field and dark field imaging.
4.0
Applicable Documents
5.0
Definitions &
Process Terminology
6.0
Safety
Be sure not to change the objectives manually. They can only be controlled by the ErgoPlan control panel (see picture below). DO NOT crash the sample into the objective; this will ruin the resolution of the microscope. ALWAYS turn off the light when you are done.
7.0
Statistical/Process
Data
8.0
Available Process,
Gases, Process Notes
9.0
Microscope
Operation
9.1
Log on: Enable the microscope using wand. Log onto
the windows PC using the username and password provided.
9.2
Open video capture: Click on the Videum Capture icon to launch
the image capture application. Turn on
the light using the black knob at the front of the microscope.
9.3
Load Sample: Make sure to lower the tray to minimum and
change the objective to 5x by pressing the lower tray button and button 1,
respectively on the ErgoPlan controller. This will ensure that the sample will
not hit the objective when it is moved under it. Next, using the joystick, move the chuck from
under the microscope and load your sample, replacing the dummy wafer that
should be on the chuck. The button on
top of the joystick will make the tray move faster.
9.4
Focus: Use
the white focusing knobs on the sides of the microscope to bring your sample
into focus, while looking through the eyepiece.
Do this using the 5x objective first to make sure the objective does not
hit the sample, and to greatly reduce the time it takes to move the sample into
focus (the xyz-stage moves at a rate inversely proportional to the
magnification). Make sure the OFFS, APR,
DF, and GRY buttons are off during this procedure. Once focused can increase the magnification
of the microscope using the numbered buttons on the ErgoPlan and readjust the
focus as needed.
9.5
Dark field: You can select dark field mode by clicking on
the DF button on the ErgoPlan.
9.6
Image Capture: Once
you have focused on the area you would like to capture, click the Capture Still
image button in the Videum Capture program, and then click save as in the top
left corner of the image. You can also
use the Capture -> Still Image and File -> Save As... Menu items. Save your pictures in your location of choice
but DO NOT leave them on the desktop as they will be deleted.
9.7
Unload sample: Make
sure to lower the tray to minimum again, switch back to the 5x objective, and
replace your sample with the dummy wafer.
Move the dummy wafer back under the microscope. TURN OFF THE LIGHT.
9.8
Log Off: Log off of the windows computer and disable
the machine on wand.
10.0
Troubleshooting
10.1 No image in capture window: If you cannot see an image in the capture
window, first make sure the light is on, and then check to see if the aperture
to the CCD camera is open by sliding the bar that is just below it.
10.2 Frozen Image in XCAP:
If the CCD image in the XCAP imaging program is frozen, select the
Unlive radio button then the Live radio button (in the Capt. tab of the
Adjustments window (View -> Adjustments)).
11.0
Figures & Schematics
