Chapter 8 – TESTING/INSPECTION EQUIPMENT

8.00 – Electrical Measurements

8.01 - Four-Point Probe Resistivity Measurement

8.02 - Surface Charge Analyzer (SCA)

8.03 - I-V Probe Station

8.04 - General Probe Station

8.05 - Electroglas Autoprobe in DCL

8.10 – Profilometers

8.11 - Alpha-Step IQ Surface Profiler

8.12 - Dektak Profilometer

8.13 - Wyko NT3300 Profiling System

8.14 - DI AFM Nanoscope Dimension 3100: Atomic Force Microscope

8.20 – Microscopes/Optical

8.21 - Reichert Inspection Microscope

8.22 - Linewidth Measuring System

8.23 - UVScope

8.24 - Memscope

8.25 - Computer-Micro-Vision-System

8.30 – Thin Film Measurements

8.31 - Rudolph Ellipsometer

8.32 - Ellipsometer (sopra) (pdf)

8.33 - NanoSpec Film Thickness Measurement System

8.34 - Nanometrics 210 XP Scanning UV – Nanospec/DUV Microspectrophotometer

8.35 - FilmTek Thin Film Measurement

8.40 – E-Beam/X-Ray

8.41 - JEOL 6400 SEM and Nanometer Pattern Generation System (same as 4.16)

8.42 - Leo 1550 Scanning Electron Microscope

8.43 -

8.44 - Siemens D5000 X-Ray Diffractometer

8.50 – Others

8.51 - Sartorius A200S Electronic Analytical Balance

8.52 - Flexus Thin Film Stress Measurement

8.53 - Tensiometer (KSV Sigma 701)

8.54 - Contact Angle Measurement System (Kruss)

8.55 - FTIR In Situ Depth Monitoring System