Lab Members Meeting
10/11/05
Cleanfest
This year the Microlab Annual Cleanfest will held on
October 24th-25th-26 (Monday-Tuesday-Wednesday.) Signup sheets are posted on the
Microlab lobby double doors. All active lab members are invited to participate
to make this event a success.
Safety
sink432c: All lab members are encouraged
to take the written 432a and c test available at the front desk. Use of these
sinks now requires passing this test. Anyone using either of these sinks for
any reason (including rinsing empty chemical bottles) must take this test.
NOTE: A correction has been made for
the manual of sink432a as also corrected on the written test. The automated
fire suppression system for sink432 is no longer in use. It arrived with this
donated sink and was removed because it did not function and parts to make it
work are no longer available. Sink432a is made of fire-resistant polypropylene.
Chem Waste: At the advice of Campus Environment,
Health and Safety we have switched the type of empty bottles we recycle for
organic chemical waste collection at sink4 and sink432c, from empty developer
bottles to empty hydrogen peroxide bottles. The purpose in using recycled hydrogen
peroxide bottles is they have vented caps.
These are collected in a blue RECYCLE BIN in the rear of 432b and
available for use. (There have been several incidents at other research
facilities where chemical waste bottles have exploded because they were tightly
capped and pressure built up.)
Miscellaneous Lab
Member Notes
The
Microlab storage areas are overloaded. Lab members are encouraged to discard
unneeded items. Lab members who need long-term storage of items not needed for
processing should contact Marilyn Kushner (marilyn at eecs). Marilyn
can allocate some space on the 145 Cory mezzanine for long-term storage as we
have some new lockers available.
Process Equipment
Updates
4ptprb: Additional probe holders are
being made in the Cory Hall Machine Shop.
asml: The AIRCO (air temperature control system) fan motor mounts failed.
Parts have arrived and it is being repaired and should be operational shortly.
Once the AIRCO is operational asml should be useable. Some problems are still
know to exist such as frequent chuck height errors. ASML field service will return
for additional asml support. In addition, we have received a replacement Cymer
laser and will sight and make an attempt to interface it with the asml. Laser
testing will be done in a "quiet" period.
acid
cabinet (white
polypro): Moved from 432C to accommodate the hfvapor etch system. We have not
yet found a good permanent location for this white, polypro cabinet which holds
silicon etch. Currently, it is in 432 near the Edwards.
cmp: New “K-pads” under test. K-pads
have a modified hole-pattern (shaped like letter-k to improve slurry
distribution. Testing is in progress. So far the results look good with faster
removal rates. Contact donnelly at eecsfor information.
cmpwc: Replacement in progress. A wet
process station with “Megasonic” clean station will replace cmpwc. This sink
has been completed and should be install shortly. In addition, the large slurry
containers will be relocated to an alcove created in 188 to increase available
floor space in the 190 cmp room.
edwards: Available with both dc and rf
targets for co-sputtering or consecutive sputtering. Au, Pt and Ti targets
available.
gcaws6: Repaired flowing flood damage.
Up and available for use. Groups accounts have been restored on the replacement
PC’s drive.
ionbeam: New, ionbeam deposition system
to be located in room 188 Cory Hall for SiC depositions. Expected installation
11/05.
heatpulse4: In progress. heatpulse3 and
heatpulse4 will be combined in a vertical rack.
hfvapor: Installed in 432C in a dedicated
wet process station. Characterization in progress. Release expected ~ 10/24/05.
jeol107: The front bezel has been
modified to facilitate adjustments and reinstalled. A replacement crt has been
ordered (8 week delivery) to replace the right-hand monitor, which has some
damage to the phosphor. In addition, we are working with jeol107 volunteers to
improve the work area.
ksaligner: Issues with backside alignment
optics are being worked out. We may be forced to send the optics package to
Suss for exchange. We are exploring our options.
leo: Stage repaired - working ok. A new tip will be needed. We are
waiting for Leo to get back to us on their support.
oxford2: We are having problems with gas
delivery line contamination in oxford2. The source of these problems has not
been identified. Obvious things, such as a leak have been ruled out. A fix is
in progress.
oven: Two new ovens have arrived. A
replacement for the old lberg oven (0-1100C) has been located and is available
in 188 Cory Hall. A second oven, A Yield Engineering Systems polymide cure
vacuum/inert atmosphere oven, equipment name “vacoven” is detailed below.
probe145: A probe station has been sighted
in 145 Cory Hall.
randex: The reservations policy has been
clarified. Please review on the online manual for the reservation protocol.
spinner1: Small substrate chucks have been
fabricated in the Cory Hall Machine Shop and are available for testing in
spinner1. The spinner1 manual has been updated.
tystar8: Modifications in progress to
develop tylan8 for small-sample steam oxidations.
vacoven: Yield Engineering System model
450PBS-29 is being sighted in 432B for polymer curing. This oven has a
programmable, sequential temperature range of 0-450C and will have vacuum and
N2-atmosphere capabilities. There is the capability of adding two additional
gas atmospheres at a later date.
westbond/westbond2: Relocated to 145 Cory Hall under laminar floor. Gowning no longer required for use.
RH-10/05