ABSTRACT

This document contains the 2006 Year-End Reports by the professional staff of the Microfabrication Laboratory. Together, these reports reflect the wide range of support staff provides to research campus wide and to instructional laboratories in EECS.

Activities of direct Microlab (ML) operations support staff, described in the sections Operations, Facilities, Administration, Computers, and Process/Baseline include 25 career employees and 10 undergraduate student assistants. The Machine Shop operates with 5 staff as an independent recharge unit. The Microlab supports 0.35 μm process technology on 6” (150 mm) silicon wafers. Equipment is also available for processing 4” and partial wafers.

The Microlab had an average monthly membership of 345 in 2006; participating PIs: 101. The Machine Shop completed 290 jobs from 42 PIs. The Berkeley Microlab Affiliates program (BMLA) comprises 22 industrial members. Detailed Microlab information can be found at http://microlab.berkeley.edu/.

K.V.