MEMORANDUM

To: Professor Tsu-Jae King, Microlab Faculty Director

From: Bill Flounders, Technology Manager

Subject: 2006 Year-End Report

Date: 22 January 2007

Cc: Katalin Voros, Microlab Operations Manager

I. Introduction

The year 2006 started with a significant milestone – Katalin Voros’ 20^th year as Operations Manager of the Microlab. One of Microlab’s Founding Professors, Dave Hodges and Interim Microlab Faculty Director Nathan Cheung were on hand to recognize this achievement. Congratulations and Thank you. This memorandum documents the major activities of the Microlab Technology Manager for the calendar year 2006. For the past year, the Technology Manager has continued two primary functions, planning for the CITRIS Nanofabrication Center (the planned successor facility to the Berkeley Microlab) and, technology support for the existing Microlab.

At the CITRIS Research Symposium on December 14, 2006 the lead benefactors to CITRIS were publicly announced. The leadership private investors are: Dado and Maria Banatao (parents of 3 UC Berkeley graduates) Sehat Sutardja (EE ’85, ’88) and Weili Dai (CS ’84); and, Pantas Sutardja (EE ’83, ’85, ’88) and Ting Chuk (EE ’85). In recognition of their major investment and support of CITRIS: The CITRIS Headquarters Building will be Sutardja-Dai Hall. Thanks to the commitment and vision of the Sutardja and Dai families, cofounders of Marvell Semiconductor, the successor to the Berkeley Microlab will be the Marvell Nanofabrication Laboratory.

II. Technology Support of Existing Laboratory

VIP Visit

The Technology Manager hosts numerous visiting dignitaries from industry and academia providing lab tours and overview of operations. This year was no exception and usually these visits are just ‘par for the course’. However, one visit was does deserve to be documented in this annual report. On June 1^st, 2006, the Microlab hosted the UC Berkeley Chancellor Robert Birgeneau. Chancellor Birgeneau is a physicist by training so this visit was not a ‘walk by photo op’. Instead the Chancellor spent a full hour hearing from Berkeley faculty about the value to their research that the shared Microlab facility provides and then took a fully gowned laboratory tour. The Chancellor went into every room and asked extensive questions about tool capabilities and laboratory infrastructure. It was a distinct pleasure to host a keen researcher with such a passion for science and it is invaluable to the Microlab to have such a champion of our operation.

Proposal Update

• The Technology Manager was a primary contributor to a National Science Foundation / Major Research Instrumentation (NSF/MRI) proposal for a new e-beam lithography tool for the Microlab. Unfortunately, this proposal was not funded. Reviewer comments described the proposal as strong but faulted the UC team for having access to three other e-beam lithography tools. The proposal specifically described each of these other systems and their associated shortcomings and especially access restrictions. However, the reviewers believed that access to any other tools contradicted the proposal’s claim of the significant need for an updated general access tool. Immediate resubmission for 2006 was considered but not pursued. The campus selects those groups that can apply for NSF/MRI funds and it was deemed unlikely that resubmission of an EBL tool would be welcomed. Alternate funding paths and tool vendors will be developed in 2007.
• The final report for the DARPA funded proposal “Coating and Surface Modification of Microstructures by Molecular Vapor Deposition and Photochemical Processing” was submitted. The custom excimer lamp was installed and tested in the AMST system but no standard process using this component has been developed yet. Extensive details of this tool development effort are contained in the annual report of BSAC Senior Development Engineer Matt Wasilik.
• The Technology Manager participated in an National Science Foundation review panel to award new NSF Industry University Cooperative Research Centers (IUCRC). BSAC was one of the first NSF IUCRC centers and it was the Technology Manager’s familiarity with BSAC operations and industry members that led to his request to serve as a IUCRC panel reviewer. This is an excellent format for reviewing the capabilities of other universities and remaining abreast of recently funded nanofabrication research proposals.

Coordination of Microlab with Capabilities of the Biomolecular Nanotechnology Center (BNC)

Construction of the new QB3 Stanley Hall Biosciences Building is complete. This building will be home to another clean room and micro/nanofabrication facilty – The Biomolecular Nanotechnology Center (BNC). Since the College of Engineering is trying to solicit equipment donations for both the BNC and the Marvell Lab in the new CITRIS building, Dean Richard Newton requested that a coordinated tool list be developed for both facilities. Though the Technology Manager has been requesting a larger role in management of the BNC to avoid duplication and insure success of both facilities, this is the first time the College has recognized the need for this coordination and was especially welcome.

The Technology Manager developed a proposed tool list for each facility and tool focus areas. The tool focus areas are presented in Table 1. Though many PIs. including QB3 Co-Director and former Dean of the College of Chemistry, Clayton Heathcock expressed support for the proposed process and tool distinctions, BNC Co-Director Prof Luke Lee of Bioengineering indicated his preference for extensive tool duplication in the BNC of many fabrication capabilities already available in the Microlab and slated for migration to the new Marvell Lab. It was critical to have a first review of this subject and attempted coordination; this will be an on-going coordination effort.

Microlab / Marvell Lab	Technology/Tools	BNC
Acid Clean Solvent Clean Wet Etch	Wet Process	Acid Clean Solvent Clean Wet Etch
Contact (436 nm, 365 nm) Projection (365 nm, 248 nm) E-beam	Lithography	Contact (436 nm, 365 nm) Stereolitho Molecular Imprint
Pattern generator or new mask making	Mask Making	Direct write SF100
Inert Oxygen Fluorine/Chlorine	Etch	Inert Oxygen Polymer
Horizontal tube furnaces Rapid thermal anneal Nanowire/tube growth	Thermal	Furnace general anneal oven for polymer cure
PVD, CVD, IBAD MOCVD, Epi-Si ALD	Thin Film Dep	Polymer Spin coat Polymer hot emboss
(Solid State) CD SEM Thin film optical Stroboscopic interferometry Electrical probe station Autoprober	Test / Metrology	(Solution Phase) Environmental SEM UV/Vis/IR Raman Spec Scanning force microscopy Liquid phase probe station Impedance spectroscopy
Wafer wafer bond Flip chip bond Chem mech planarization	Package / Assembly / Machining	Laser etch CNC diamond drill mill Focused ion beam
Epi Si MOCVD Ebeam litho	Unique	Tissue Culture Molecular Imprint
Mask Layout IC Modeling	CAD	Protein Modeling Solution Phase Dynamics

Table 1 - Proposed Tool and Process Distinctions Between the New Marvell Nanofabrication Laboratory

and the Biomolecular Nanofabrication Center (BNC)

Process Review & Material Compatibility

The Technology Manager reviews at least weekly new material and process requests. Some highlights from the past year were addition of a residual gas analyzer to the ion mill system to enable end point detection; ALD of aluminum oxide as an interlayer between multiple films of parylene; use of 100 micrometer thick photoresist tape as an alternate to thick resist; use of 1cm diameter round soda lime cover slips as lipid bilayer deposition substrates for cell membrane characterization.

The material set handled in the Microlab continues to expand and vigilant review of tools and processes are required. Together with the Process Manager, the Technology Manager has developed two chapters for the Microlab on-line manual related to materials/tool compatibility and contamination control. In addition the Technology Manager has committed to participating in a new component of the orientation which will serve as a substitute for the previously developed class on semiconductor devices for non-electrical engineering majors.

Staffing

The Technology Manager continues to provide direct supervision of the BSAC Senior Development Engineer, Matt Wasilik. Matt has successfully taken on most BSAC specific tasks previously provided by the Technology Manager. A separate report describing his activities is included in the Microlab Annual Report.

The Technology Manager continues to serve on the interview committee for the Senior Scientist recruiting effort at the Molecular Foundry at LBL. This courtesy was extended by the Molecular Foundry Nanofabrication Laboratory Director, Prof Jeff Bokor. Ongoing coordination of the efforts at the Molecular Foundry and the new CITRIS Nanolab are insured by this type of interaction.

III. New Laboratory Planning & Design

Construction

Construction of Sutardja-Dai Hall, home of the Marvell Lab – successor to the Berkeley Microlab is well underway. A live webcam of the construction site is available at: http://www.citris-uc.org/capital_projects/webcam All foundation work has been completed and erection of the steel superstructure is underway. The walls of the sub-fab have been poured and the mechanical, electrical, and plumbing sub contractors have completed detailed coordination drawings of all lab levels. The first floor lab waffle slab will be poured in the next few weeks.

Design Review

The Technology Manager prepared an overview of the new lab design process for the 16^th Biennial IEEE University Government Industry Microelectronics (UGIM) symposium held in San Jose during June 2006. The full report is available in the IEEE Conference Proceedings publication. A separate section of this paper was dedicated to infrastructure features that provide contingency laboratory operations. Most of these features were added to the present lab after construction – but they provided valuable ‘lessons learned’ and were captured in the new lab planning process. This information is described in Table 2.

PCW (Process Cooling Water) – Design emergency bypass to city water in the event of PCW service interruption. Consider, just because one or two plasma tools have a cooling water resistivity requirement (e.g. in the range 50 k-ohm to 1 M-ohm) is no reason to impose this requirement on the entire PCW loop. Imposing resistivity requirements on the entire PCW system will lead to specification of 304 ss as the piping material and large DI columns (with regular maintenance needs). Copper piping and small point of use DI cartridges for the one or two tools that need deionized cooling water are recommended as a more cost effective solution.

CDA (Compressed (clean) Dry Air) – Design emergency bypass to house N2 in the event of CDA service interruption.

DI (Deionized Water) – Design RO storage tanks to enable limited operation in the event of DI service interruption. DI make up rate does not have to be directly tied to maximum or even diversified DI consumption rate. RO storage can also enable the lab to accept a slower DI water make up rate. During high consumption times tank depletion will exceed makeup; during low consumption; tanks will be replenished. Install DI columns in two sets that are plumbed for both serial and parallel flow.

AWN (Acid Waste Neutralization) – Even if using a continuous flow through system, a pretreatment holding tank is recommended. The holding tank will enable some limited operation in the event of AWN service interruption.

Windows – Include the largest possible freight elevator the project can accommodate, then use windows as backup. In the rare event of delivery of exceptionally large equipment - make certain lab access windows are as large as possible and can be removed to enable equipment delivery. Review the load limits of the plaza outside the potential delivery window to make certain crane and associated rigging can be supported.

Roof – Put a hatch in your roof; size it to the largest serviceable component. It is much less costly and less disruptive to operations to deliver an exhaust fan motor by chain hoist to the roof then by crane or helicopter. It is admittedly preferable to simply have the freight elevator service the roof level – but this will add cost.

Floor Penetrations – A vibration resistant waffle slab is a significant slab of concrete – 24 – 48” thick depending upon vibration class and column layout. At any location where pipe penetrations were already planned through the floor, additional penetrations of a wide range of diameters were designed. These unused penetrations are essentially fire rated and approved empty and capped conduit paths. These penetrations will make future piping installs much easier.

Table 2 - New Laboratory Infrastructure Contingency Features

(from UGIM 2006 Report “Building the New Bereley Microlab”)

Budget Issues & Value Engineering

The laboratory went through a painful value engineering exercise. Faced with a construction budget shortfall of several million dollars, the Technology Manager was asked to select a cost saving route of shelling one floor of the lab. As an alternate – with equivalent savings, the Technology Manager developed a strategy that would remove all laboratory systems from the mechanical support space – but protect all distribution piping and both lab rooms. The goal was to protect the piping coordination effort and to insure that the lab could be occupied no matter what. Due to the lack of air handling and limited fire protection – a shelled floor can not even be occupied. However, a laboratory with no basement subsystems – though not a fully functioning lab could be occupied. This is a critical distinction. Laboratory staff can work in an occupyable space and attempt to install the missing systems; whereas a shelled room can not be made accessible to staff.

Thanks to the championing efforts of the CITRIS Director, the lab did not have to pursue either of these strategies. Funds were diverted from the building furniture budget and the building landscape allotment to provide the final lab construction funds. Completion of the laboratory – without removal of any critical lab systems is thanks to the far sighted prioritization of CITRIS Director Sastry.

Marvell Lab Marketing & Equipment Donation Coordination

The College of Engineering has hired a new Director of Corporate and Foundation Relations – Barbara Mueller. Barbara has secured audiences for the Lab Faculty Director and Technology Manager with several major equipment manufacturers. Based upon expertise, location, and previous donation history a coordinated equipment donation picture is beginning to emerge which helps identify best vendor for each process need. A sense of this still evolving picture is presented in Table 3.

	Vendor 1	Vendor 2	Vendor 3	Vendor 4	Vendor 5	Vendor 6	Vendor 7	Vendor 8
Thermal	UV and RTP only	UV and RT only	-	-	x 55%mkt	-	-
CVD	x	x	-	-	x 25% mkt	-	-
PVD	x	x	-	-	-	-	-
ALD	x	x	-	-	-	-	-
Etch	x	-	x	-	x 60 % mkt	-	-
CMP	x	x		-	-	-	-
Epi-Si	X	-	-	-	-	-	-
Wet Process	x	x	x	-	x SCCO2	-	-
Metrology	x	-	-	-	x Timbre autoprobe	-	x	x
Litho – Exp		-	-	x	-	-	-
Litho - Coat		-	-		x 75% mkt	x	-
Ebeam								x
Location	HQ: CA Eng:	HQ: CA Eng: OR, AZ	HQ: CA Eng: CA	HQ: Holland Eng: CA, AZ	Japan	HQ: OH Eng: OH	HQ: CA Eng: CA
Previous Donation	Yes FLCC	Yes FLCC		Yes FLCC	No	No	Yes	No
Target Donation	Epi-Si	INOVA	Etch	Litho	Timbre autoprobe	Mark7	9010	TBD
Issues	Review power and H2 req’mts	Hollow cathode target assemblies expensive to support	Single Modules possible	248nm 193nm Immersion	Donation through Ritetrack may be supported by TEL	Licensed for TEL legacy tools		TEM need is in MSE New lab need is ebl

Table 3 - Coordinated Donation Request Considering Vendor Expertise

Support Location and Previous Donation History

The Technology Manager traveled to Tokyo Japan in April of this year and participated in the CITRIS Asia Symposium. During this symposium, a separate day was dedicated to increasing awareness of the new lab to Japanese business leaders. Select symposium participants were invited to attend a Special Interest Group – Japan (SIG-J) meeting. At the SIG-J meeting, the Technology Manager made a detailed presentation describing the new and partnership possibilities. Interest was significant. As a result of this meeting, one visitor, Tokyo Electron Ltd (TEL) has committed to a CITRIS affiliate membership and will be donating a unique metrology tool – the Timbre Technology scatterometry work station.

IV. SUMMARY

Several years of design and planning are finally coming to fruition. It is down right exciting to see steel and concrete rise out of the ground – providing a central headquarters for the Berkeley led California Institute of Science and Innovation known as CITRIS and insuring the future of Berkeley’s unique shared micro/nanofabrication laboratory. For several years, we have had a moving date for new lab completion; now, we have a fixed target date. The slow but steady improvement in the economy, especially for semiconductor tool manufacturers has improved the climate for new lab support and donations. We are in the right place at the right time. Fund raising efforts for Microlab migration and new lab fit up (The Berkeley Microlab Futures Campaign) are just getting underway.

Laboratory planning in an academic environment is challenging. The only assurance is that the demands on the facility will constantly change and evolve. The first Berkeley Microlab served the EECS department and beyond for twenty years; the present Berkeley Microlab has served the entire College of Engineering and far beyond for almost 25 years. The new Marvell Lab is poised to serve the entire Berkeley campus and partner campuses at Davis, Santa Cruz and Merced for the next twenty years following the same successful model of its predecessors – a laboratory is meant to be a dynamic environment that constantly modifies the facility to respond to the needs of the researchers. Though construction may be complete in 2008, the Marvell Lab will not be finished until it is retired by its successor facility.