150 mm Retooling Expenditures Paid by Microlab Funds

150 mm Retooling Expenditures
Paid by Microlab Funds
 
               
Photo/Mask Wet Processing Thermal Processing
   
APT chrome/emul  $      19,500.00 sink3/4/6/8/srd  $           37,202.00 tystar1-4  $        149,198.00
ASML  $        8,609.00 sink5/7/srd  $         107,500.00 tystar9-12  $        386,570.00
GCA wafer stepper6  $      16,272.00 sink9/srd6  $           45,400.00 tystar13-16  $          49,146.00
SVG 8800 coat/dev  $      71,300.00 Cassettes/handling equipment  $             4,990.00 tystar17  $          70,942.00
SVG coat3  $        2,672.00 HF Disposal (pump cart)  $           12,300.00 tystar18  $          24,300.00
Matrix asher  $        6,600.00 Acid Waste Disposal System  $           42,800.00 tystar19  $          18,549.00
uvbake  $      12,700.00 Tube cleaning station  $             2,542.00 tystar20  $          11,417.00
Quintel mask aligner  $        5,800.00 heatpulse  $            5,196.00
  LPCVD Exhaust Upgrade  $          17,129.00
Total  $ 143,453.00 Total  $      252,734.00 Total  $     732,447.00
Etch Thin Films Computers
   
Lams1-5  $      35,325.00 CPA  $             3,000.00 Server Upgrade (silicon)  $       77,900.00
Centura  $    127,954.00 Novellus (rm 144)  $           76,500.00 Microlab LAN (CAPE)  
XeF2 Etcher  $        7,056.00 P5000 (rm 190)  $           89,400.00 Equip Control (WIS)  
  Edwards EB3 evaporator  $           13,800.00 Fac. Monitoring (RUMS)  
  Edwards sputterer  $             5,000.00  
  Oxford2 PECVD  $             1,900.00  
Total  $ 170,335.00 Total  $      189,600.00 Total  $       77,900.00
Planarization Measurements Utilities
   
Strausbaugh cmp  $      18,600.00 autoprobe  $             5,900.00 LN Vessels (1/3 share)  $          19,500.00
SSEC cmp wafer cleaner  $      31,504.00 cdsem  $           20,400.00 LN Vessels Install  $          11,100.00
  nanospec  $             1,558.00 1" N2 Gas Lines  $          20,300.00
  microscopes  $             2,982.00 HAZCOM Upgrade  $            1,371.00
  profilometer  $             1,235.00 411 Cory Upgrade  $          15,988.00
   
Total  $    50,104.00   Total  $         32,075.00     Total  $       68,259.00
rs 12/04                                                             Grand Total  $1,716,907.00
Table 4