|
Room No. |
Name |
PI |
|
420 |
Faculty Director: |
|
|
409 |
Maharbiz Lab |
|
|
490 |
Device
Characterization Lab (DCL) |
|
|
490 |
||
|
490 |
Yablonovitch Test
Lab |
|
|
471 |
||
|
484 |
IC Test Lab |
|
|
373A |
SAW/Bio Testing Lab |
|
|
367 |
MEMS Testing Lab |
|
|
355 |
||
|
317 |
||
|
|
||
|
145, 145M |
Microlab Analytical
Lab |
|
145A,B,C,D |
RF MEMS Testing |
|
|
143 |
||
|
144A,B |
PVD Thin Films Lab |
|
|
144C,D,E |
||
|
147 |
||
|
149, 188 |
||
|
151 |
||
|
155 |
MBE1 Lab |
|
|
157 |
MBE2 Lab –
Dubon/Specht |
|
|
159 |
MOCVD Lab |
|
|
161-163 |
||
|
173 |
Opto-MEMS Testing |
|
175B
|
||
|
187 |
||
|
188 |
Nanoelectronics Lab |
|
|
190 |
Planarization
Lab |
K.Voros/M. Leullier – February
2008