Layout

Use any CAD software, which generates a .gds, .tdb, or .cif file.

Conversion

Create your own conversion using Artwork Conversion Software, http://www.artwork.com/, to produce a .tap and a .tix file, readable by our pattern generator. Submit on line (if you are a Microlab member) or by e-mail Marilyn Kushner (marilyn at eecs) your .tap and .tix or .cif files.

► If you cannot provide .tap and .tix or .cif files, we will make the best effort to convert your .gds, .tdb files for a flat fee of $150. In this case, submit also the name and number of design layers, the name of the topmost cell, the required magnification to be made on the design and the plate size.

► During conversion the layout is centered according to its maximum height and width. If you have multiple layers please use a common frame around all of the layers to align them.

► 900 μm x 900 μm is the maximum box size that the pattern generator can create. The specification of the pattern generator do not guarantee correct alignment of boxes for thin lines (< 5 μm) longer than 900 μm, the lines can be broken at the meeting point of the boxes.

► A mask is created by flashes of the pattern generator. We do not make masks larger than 150,000 flashes.

► If your layout does not convert at the first attempt, the file will be returned to the sender for modifications. After corrections, we will make a second attempt for an additional fee of $100. If conversion fails, mask request will be denied.

Note: For details, please see on-line lab manual Chapter 3.1.

Mask Making

Total mask cost comprises of:

► Machine Time: Determined by the size of the layout. (After conversion, this number is shown as flash count.)

► Staff Time: Conversion (if applicable) and processing time.

► Materials: Plate cost and shipping.

Price Qutotation

► Price quotation cannot be given until the layout size is known, i.e. the file went through conversion.

► After conversion, you will receive an estimate of total costs.

Purchase Order

► After you have a cost estimate, establish a Purchase Order.

Service

The UC Berkeley Microlab provides mask making services only to University-affiliated clients.

KV – 2006

Updated by A. Pongracz – 3/07