Equipment
Included in General Lab Fee
|
Short Name |
Long Description Name |
|
4ptprb |
4 point resistivity probes |
|
95awn |
Acid Waste Neutralization W2 Systems |
|
afm2 |
Digital Instruments AFM |
|
aptchrome |
APT chrome mask developer |
|
aptemul |
APT emulsion mask developer |
|
autoprobe |
Electroglass autoprobe
in DCL |
|
balance |
Laboratory Balance |
|
cad |
CAD Software |
|
cleanvac |
Busch vacuum pump for cleanvac |
|
computers |
catch all for computer related items |
|
facilities |
building,lights,fire alarm,etc. |
|
fancoil |
fan coil units inside lab |
|
filmtek |
Film Tek 2000 |
|
handry |
Hand Dryer in lobby |
|
hazmat |
Hazardous Material Monitoring System |
|
heatpulse1 |
Heatpulse rapid thermal annealer for Si |
|
heatpulse2 |
Heatpulse rapid thermal annealer for GaA |
|
heatpulse3 |
AG Heatpulse 610 |
|
heatpulse4 |
AG Heatpulse 610 |
|
hepa |
high efficiency purified air filter |
|
hfvapor |
Idonus 6' HF Vapor
Etcher |
|
hld |
Edwards Spectron 600
HLD |
|
hummer |
gold evaporator for cssem
samples |
|
iv |
I-V probe station (AN3) |
|
kruss |
Kruss Contact Angle
Analyzer |
|
lapper |
|
|
linewidth |
Linewidth & Feature
Measuring System |
|
maskcopy |
Ultratech mask copier |
|
matrix |
Matrix 106 Resist Remover |
|
memscope |
MEMS Microscope |
|
met1 |
Met One Particle Counter |
|
microscope |
all microscopes |
|
nanoduv |
Nanospec/DUV Microspectrophotometer |
|
nanospec |
Nanospec AFT film thickness
measuring sy |
|
nrc |
NRC evaporator |
|
oven |
all ovens |
|
phones |
telephones |
|
polisher |
|
|
primeoven |
Yield Engineering Systems YES - 5 |
|
probe145 |
Probe Station |
|
probe145-2 |
Rucker & Kolls 667 |
|
pumps |
all Microlab vacuum pumps |
|
quasar |
Quasar video monitor |
|
quintel |
Quintel Q4000-6IR Contact Printer |
|
reichert |
Reichert Polylite
inspection microscope |
|
rodi |
Reverse Osmosis DeIonized
water system |
|
rudolph |
Rudolph AutoEL-III |
|
safety |
safety problems |
|
sealer |
Impulse Foot Sealer |
|
sink1 |
left sink in GL1 |
|
sink12 |
sink in R1 |
|
sink2 |
right sink in GL1 |
|
sink3 |
tmah
and koh etch in GL2 |
|
sink4 |
sink in Y1 |
|
sink432a |
Fumehood Sink |
|
sink432c |
Fumehood Sink (located in 432C) |
|
sink5 |
sink in Y2 |
|
sink6 |
sink in V1 |
|
sink7 |
left sink in V2 |
|
sink8 |
right sink in
V2 |
|
sink9 |
sink in V3 |
|
sinkcmp |
CMP Wet-sink |
|
sinkplate |
hood and sink
in oldlab, 432D |
|
sinkplate1 |
Plating sink
low current |
|
sinkplate2 |
Plating sink
high current |
|
spinner1 |
Headway
spinner, Y1 |
|
spinner2 |
Cee 100CB spincoat/bake
unit |
|
spinner3 |
Cee spinner |
|
srd1 |
Verteq Spin Rinser
Dryer |
|
srd2 |
Verteq Spin Rinser
Dryer |
|
srd3 |
Spin Rinse
Dryer 3 |
|
srd5 |
Semitool SRD |
|
srd6 |
Verteq 6" SRD |
|
srdsink4 |
Verteq Spin Rinser
Dryer |
|
srdsink5 |
Verteq Spin Rinser
Dryer |
|
srdsink6 |
Verteq Spin Rinser
Dryer |
|
srdsink8 |
Verteq Spin Rinser
Dryer |
|
static |
Ion Systems
Inc. enviroment ionizer |
|
technics-c |
Technics VLSI plasma etch |
|
tensiometer |
Sigma 701 Tensionmeter |
|
utilities |
air, water, temp, etc... |
|
uvbake |
Fusion Photostabilization System |
|
uvscope |
Leica I-line Microscope |
|
v401 |
Veeco 401 vacuum system |
|
vacleaner |
Spencer vacuum
cleaner |
|
vacoven |
YES (Yield |
|
zellweger1 |
Zellweger SPM Acid Gas Detector |
|
zellweger4 |
Zellweger CM4 Metal Hydride Detector |
6/26/08