Equipment
Included in General Lab Fee
|
Short Name |
Long Description Name |
Location |
Price |
Unit |
|
4 point resistivity probes |
microlab |
$0.00 |
minute |
|
|
afm2 |
Digital Instruments AFM |
cory-151 |
$0.00 |
each |
|
aptchrome |
APT chrome mask developer |
microlab |
$0.00 |
minute |
|
aptemul |
APT emulsion mask developer |
microlab |
$0.00 |
minute |
|
autoprobe |
Electroglass autoprobe in DCL |
cory-490 |
$0.00 |
minute |
|
balance |
Laboratory Balance |
microlab |
$0.00 |
minute |
|
barrelasher |
Tegal Barrel Asher |
microlab |
$0.00 |
minute |
|
bottlewash |
Bottle Washer |
582A |
$0.00 |
each |
|
cape |
Common & Personal Environment |
microlab |
$0.00 |
minute |
|
ellips |
Gaertner ellipsometer |
microlab |
$0.00 |
minute |
|
ganneal |
liquid phase epitaxy system |
microlab |
$0.00 |
each |
|
heatpulse1 |
Heatpulse rapid thermal annealer for Si |
582 |
$0.00 |
minute |
|
heatpulse2 |
Heatpulse rapid thermal annealer for GaA |
582 |
$0.00 |
minute |
|
heatpulse3 |
AG Heatpulse 610 |
386 |
$0.00 |
minute |
|
heatpulse4 |
AG Heatpulse 610 |
386 |
$0.00 |
each |
|
heatpulse8 |
Heatpulse 8 inch |
386 |
$0.00 |
minute |
|
hfvapor |
Idonus 6' HF Vapor Etcher |
microlab |
$0.00 |
minute |
|
hummer |
gold evaporator for cssem samples |
384 |
$0.00 |
minute |
|
irscope |
Infrared Microscope |
microlab |
$0.00 |
minute |
|
iv |
I-V probe station (AN3) |
microlab |
$0.00 |
minute |
|
keyence |
Demo digital microscope |
380 |
$0.00 |
minute |
|
kruss |
Kruss Contact Angle Analyzer |
582A |
$0.00 |
minute |
|
lacvd |
Laser Assisted Chemical Vapor Depostion |
597 |
$0.00 |
minute |
|
lapper |
|
microlab |
$0.00 |
minute |
|
linewidth |
Linewidth & Feature Measuring System |
380 |
$0.00 |
minute |
|
maskcopy |
Ultratech mask copier |
microlab |
$0.00 |
minute |
|
matrix |
Matrix 106 Resist Remover |
microlab |
$0.00 |
minute |
|
microscope |
all microscopes |
microlab |
$0.00 |
minute |
|
microscopes |
Optical microscopes |
nanolab |
$0.00 |
each |
|
msink1 |
manual litho |
382 |
$0.00 |
minute |
|
msink16 |
General purpose fume hood/wet process |
582A |
$0.00 |
minute |
|
msink18 |
General purpose fume hood/wet process |
582A |
$0.00 |
minute |
|
msink3 |
resist strip, develop |
382 |
$0.00 |
minute |
|
msink5 |
HF release etch wet process station |
382 |
$0.00 |
minute |
|
msink6 |
furnace pre-clean |
384 |
$0.00 |
minute |
|
msink8 |
post PR cleaning |
384 |
$0.00 |
minute |
|
nanoduv |
Nanospec/DUV Microspectrophotometer |
380 |
$0.00 |
minute |
|
nanospec |
Nanospec AFT film thickness measuring sy |
microlab |
$0.00 |
minute |
|
netscope |
Leica IMN100 Microscope |
382 |
$0.00 |
minute |
|
nrc |
NRC evaporator |
582 |
$0.00 |
minute |
|
oven |
all ovens |
microlab |
$0.00 |
minute |
|
polisher |
|
microlab |
$0.00 |
minute |
|
primeoven |
Yield Engineering Systems YES - 5 |
microlab |
$0.00 |
minute |
|
quintel |
Quintel Q4000-6IR Contact Printer |
microlab |
$0.00 |
minute |
|
reichert |
Reichert Polylite inspection microscope |
microlab |
$0.00 |
minute |
|
rs100 |
KLA Tencor Resistivity Mapping Tool |
380 |
$0.00 |
minute |
|
rudolph |
Rudolph AutoEL-III |
microlab |
$0.00 |
each |
|
sealer |
Impulse Foot Sealer |
microlab |
$0.00 |
minute |
|
sink1 |
left sink in GL1 |
microlab |
$0.00 |
minute |
|
sink12 |
sink in R1 |
microlab |
$0.00 |
minute |
|
sink2 |
right sink in GL1 |
microlab |
$0.00 |
minute |
|
sink3 |
tmah and koh etch in GL2 |
microlab |
$0.00 |
minute |
|
sink4 |
sink in Y1 |
microlab |
$0.00 |
minute |
|
sink432a |
sink432a |
microlab |
$0.00 |
minute |
|
sink432c |
Fumehood Sink (located in 432C) |
microlab |
$0.00 |
minute |
|
sink5 |
sink in Y2 |
microlab |
$0.00 |
minute |
|
sink6 |
sink in V1 |
microlab |
$0.00 |
minute |
|
sink7 |
left sink in V2 |
microlab |
$0.00 |
minute |
|
sink8 |
right sink in V2 |
microlab |
$0.00 |
minute |
|
sink9 |
sink in V3 |
microlab |
$0.00 |
minute |
|
sinkcmp |
CMP Wet-sink |
cory-190 |
$0.00 |
minute |
|
sinkplate |
hood and sink in oldlab, 432D |
microlab |
$0.00 |
minute |
|
sonogage |
Tencor Sonogage resistivity/wafer thickn |
microlab |
$0.00 |
minute |
|
spinner |
Headway Spinner - msink1 |
382 |
$0.00 |
use |
|
spinner1 |
Headway spinner, Y1 |
microlab |
$0.00 |
minute |
|
srdmsink6 |
Semitool Spin Rinse Dryer 880-S |
386 |
$0.00 |
minute |
|
srdmsink8 |
Verteq Spin Rinser Dryer |
386 |
$0.00 |
minute |
|
srdsink4 |
Verteq Spin Rinser Dryer |
microlab |
$0.00 |
minute |
|
srdsink5 |
Verteq Spin Rinser Dryer |
microlab |
$0.00 |
minute |
|
srdsink6 |
Verteq Spin Rinser Dryer |
microlab |
$0.00 |
minute |
|
srdsink8 |
Verteq Spin Rinser Dryer |
microlab |
$0.00 |
minute |
|
technics-c |
Technics VLSI plasma etch |
microlab |
$0.00 |
minute |
|
tensiometer |
Sigma 701 Tensionmeter |
582A |
$0.00 |
minute |
|
uvbake |
Fusion Photostabilization System |
microlab |
$0.00 |
minute |
|
uvscope |
Leica I-line Microscope |
microlab |
$0.00 |
minute |
|
v401 |
Veeco 401 vacuum system |
582 |
$0.00 |
minute |
|
vacoven |
YES (Yield |
582A |
$0.00 |
each |
AWF - July 7, 2010