Special Equipment Recharge Rates

Short Name

Long Description Name

$ Cost/Unit

aln

Adv. Mod. Sputtering AMS-2003

0.56/min

amst

AMST Molecular Vapor Deposition

0.56/min

asiq

Tencor AS500 Profilometer

0.56/min

asml

ASM Lith. 5500/90 Stepper

0.64/min

canon

Canon 4X wafer stepper

0.56/min

centura

Centura deep silicon etch (centura-dps)

0.64/min

centura-met

Centura DPS Metal Etcher

0.56/min

centura-mxp

Centura Oxide Etcher

0.64/min

centura-stri

Centura Stripper

0.56/min

cmp

Strausbaugh CMP

0.56/min

cpa

CPA three-target sputterer

59.00/use

cpd

Critical Point Drying Apparatus

0.56/min

cpd2

Tousimis Critical Point Dryer

0.56/min

crestec

Crestec E-Beam Writer

2.17/min

dektak

Dektak Surface Profilometer

0.64/min

diebonder

MEI 779 Die Bonder

0.56/min

disco

Disco DAD 2H/6 saw

0.56/min

dw

Davis & Wilder Evaporator

0.56/min

edwards

Edwards Sputter System

0.56/min

edwardseb3

Edwards 306 E-Beam System

0.56/min

flexus

Tencor FleXus FLX2320 Stress Gauge

0.56/min

flipchip

Suss FC150

0.56/min

gartek

Gartek sputterer

59.00/use

gcapg

GCA 3600 pattern generator

0.56/min

gcaws

GCA 6200 wafer stepper

0.56/min

gcaws2

GCA G-Line 10X Wafer Stepper

0.56/min

gcaws6

GCA 8500 5X I-line

0.56/min

iondep

Ion Beam Deposition System

0.56/min

ionmill

Veeco ion mill

59.00/use

jeol107

JEOL 6400 E-beam Writer

0.56/min

ksaligner

Karl Suss Mask/Bond Aligner

0.56/min

ksba6

Karl Suss Bond Aligner

0.56/min

ksbonder

Karl Suss Wafer Wafer Bonder

0.56/min

lam1

Lam plasma etcher for nitride

0.56/min

lam2

Lam plasma etcher for SiO2

0.56/min

lam3

Lam 690 aluminum etcher

0.56/min

lam4

Lam Research Rainbow 4400

0.56/min

lam5

Lam 9400 TCP Poly Etcher

0.56/min

leo

Leo Scanning Electron Microscope

0.64/min

microvision

Microvision Stroboscopic Microscope

0.56/min

nanotube

Nanotube Furnace

0.56/min

nanox

GaAs Oxidation & Nanotube

59.00/use

novellus

Novellus MI2 Sputterer

0.64/min

oxford

Oxford Plasmalab System 100

59.00/use

oxford2

Oxford Plasmalab 80 PECVD

0.56/min

p5000

Applied P5000

0.64/min

parylene

Specialty Coating Systems PDS2010

0.56/min

piii

Plasma Immersion Ion Implanter

59.00/use

plotter

Hewlett Packard Wide Plotter

50.00/plot

pqecr

Plasma Quest ECR PECVD

0.64/min

ptherm

Plasmatherm reactive ion etcher

0.56/min

randex

Randex sputtering system

59.00/use

sca

Surface Charge Analyser

0.56/min

semi

Semigroup plasma etcher

0.64/min

sopra

Sopra Variable Angle/Frequency Ellips

0.56/min

sts

Surface Technology Systems ICP Etcher

0.56/min

svgcoat1

SVG 8626/36 Coater Bake Front Track

0.64/min

svgcoat2

SVG 8626/36 Coat Rear Track

0.64/min

svgcoat3

SVG 8626/36 Coater Track

0.64/min

svgcoat6

SVG8800 Coat Track

0.64/min

svgdev

SVG 8632 CTD Developer

0.64/min

svgdev6

SVG 8800 Develop Track

0.64/min

topgun

s-gun sputtering system

59.00/use