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| 150mm Retooling Expenditures |
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Paid by Microlab Funds |
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Photo/Mask |
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Wet Processing |
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Thermal
Processing |
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APT chrome/emul |
$ 19,500.00 |
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sink3/4/6/8/srd |
$ 37,202.00 |
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tystar1-4 |
$ 149,198.00 |
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ASML |
$ 8,609.00 |
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sink5/7/srd |
$ 107,500.00 |
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tystar9-12 |
$ 386,570.00 |
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GCA wafer stepper6 |
$ 16,272.00 |
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sink9/srd6 |
$ 45,400.00 |
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tystar13-16 |
$ 49,146.00 |
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SVG 8800 coat/dev |
$ 71,300.00 |
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Cassettes/handling equipment |
$ 4,990.00 |
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tystar17 |
$ 70,942.00 |
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SVG coat3 |
$ 2,672.00 |
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HF Disposal (pump cart) |
$ 12,300.00 |
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tystar18 |
$ 24,300.00 |
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Matrix asher |
$ 6,600.00 |
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Acid Waste Disposal System |
$ 42,800.00 |
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tystar19 |
$ 18,549.00 |
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uvbake |
$ 12,700.00 |
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Tube cleaning station |
$ 2,542.00 |
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tystar20 |
$ 11,417.00 |
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Quintel mask aligner |
$ 5,800.00 |
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heatpulse |
$ 5,196.00 |
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LPCVD Exhaust Upgrade |
$ 17,129.00 |
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Total |
$ 143,453.00 |
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Total |
$
252,734.00 |
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Total |
$
732,447.00 |
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Etch |
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Thin Films |
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Computers |
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Lams1-5 |
$ 35,325.00 |
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CPA |
$ 3,000.00 |
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Server Upgrade (silicon) |
$ 77,900.00 |
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Centura |
$ 127,954.00 |
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Novellus (rm 144) |
$ 76,500.00 |
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Microlab LAN (CAPE) |
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XeF2 Etcher |
$ 7,056.00 |
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P5000 (rm 190) |
$ 89,400.00 |
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Equip Control (WIS) |
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Edwards EB3 evaporator |
$ 13,800.00 |
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Fac. Monitoring (RUMS) |
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Edwards sputterer |
$ 5,000.00 |
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Oxford2 PECVD |
$ 1,900.00 |
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Total |
$ 170,335.00 |
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Total |
$
189,600.00 |
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Total |
$
77,900.00 |
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Planarization |
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Measurements |
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Utilities |
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Strausbaugh cmp |
$ 18,600.00 |
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autoprobe |
$ 5,900.00 |
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LN Vessels (1/3 share) |
$ 19,500.00 |
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SSEC cmp wafer cleaner |
$ 31,504.00 |
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cdsem |
$ 20,400.00 |
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LN Vessels Install |
$ 11,100.00 |
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nanospec |
$ 1,558.00 |
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1" N2 Gas Lines |
$ 20,300.00 |
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microscopes |
$ 2,982.00 |
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HAZCOM Upgrade |
$ 1,371.00 |
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profilometer |
$ 1,235.00 |
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411 Cory Upgrade |
$ 15,988.00 |
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Total |
$
50,104.00 |
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Total |
$
32,075.00 |
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Total |
$
68,259.00 |
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rs 12/04
Grand Total $1,716,907.00 |
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Table 4. |
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