150 mm Retooling Expenditures
a) Paid by Non-Microlab Sources
	System	PI	Fund Source	Expenditure
	ASIQ	Pisano	BSAC	$                        41,051
	ASML Installation	Spanos/Neureuther	SMART	$                        40,791
	CM4 - Toxic Gas Monitor	King/Hu	DARPA	$                        14,056
	CMP	Pisano	BSAC	$                      159,084
	CMP wafer cleaner	Spanos	SMART/VDON	$                      257,770
	Centura Installation	Pisano/Neureuther	DARPA/FLCC	$                      134,304
	Heatpulse3	King/Hu	VDON	$                        92,013
	LN Vessels (1/3 share)	Spanos	Capital Projects (HMMB)	$                        19,500
	LN Vessels (1/3 share)	Spanos	COE (HMMB)	$                        19,500
	Tystar Bank 1	Howe	CNRI/DARPA	$                      233,875
	Tystar17	Howe	DARPA	$                        94,692
	Tystar19	King/Hu	DARPA	$                      222,240
	Tystar20	Howe	CNRI/DARPA	$                      260,098
	Total Expenditures			$                1,588,974
b) 150 mm Equipment Donations
	System	PI	Donation Source	Equip. Value
	Antistatic emitters/contollers	ML/R. Hamilton	Ion Systems	$                     3,670.00
	ASML  5500/90 Stepper	Spanos/Neureuther	SMART/ASML	$              2,370,000.00
	Applied Materials P5000	Spanos	SMART/Intel	$                 372,000.00
	Autoprobe	Spanos	SMART/Intel	$                   45,000.00
	Centura	Pisano/Neureuther	SMART/AMAT	$              1,540,000.00
	CDP80 Drypumps	ML/R. Hamilton	BOC Edwards	$                 168,857.00
	Edwards E-Beam Evaporator	Pisano/Flounders	Fanuc	$                   13,013.00
	Edwards RF-DC Sputterer	Pisano/Flounders	Fanuc	$                   14,053.00
	Filmetrics Thin Film Metrology	Pisano/Flounders	Fanuc	$                     5,997.00
	GCA Wafer Stepper6	ML/R. Hamilton	LLNL	$                 245,571.00
	H-P Sinks (2 ea.)	ML/R. Hamilton	Hewlett-Packard Labs	$                   10,000.00
	Matrix PR Asher	ML/R. Hamilton	National Instruments	$                   10,000.00
	Nanometrics Nanospec	Spanos	Nanometrics	$                   70,000.00
	Novellus M2i	Spanos	SMART/Novellus	$                 950,000.00
	Oxford 80 RIE	Pisano/Flounders	Fanuc	$                   65,335.00
	Photoresist	ML/S. Parsa	Shipley/Rohm and Haas El. Mat.	$                   27,000.00
	Quintel Mask Aligner	ML/R. Hamilton	Quintel	$                 125,000.00
	Ultra Fab Sinks4,6,7,8	Pisano/Flounders	Fanuc	$                   31,306.00
	Semi Test Surface Charge Analizer	ML/R. Hamilton	Intel	$                 250,000.00
	Suss MA/BA6 Aligner	BSAC	Suss Micro Tech/Trade	$                 234,265.00
	Suss SB6 Bonder	BSAC	Suss Micro Tech/Trade	$                 202,485.00
	Tubing (SS) for Gas Lines	ML/R. Hamilton	UltraClean Technologies	$                   77,000.00
	Tystar bank4	Pisano/Flounders	Fanuc	$                 139,145.00
	Verteq Spin Rinser/Dryers	ML/R. Hamilton	Intel, LSI Logic	$                   12,000.00
	Wafers, 6" Silicon	ML/R. Hamilton	Intel	$                   65,500.00
	Wafers, 6" Silicon	ML/R. Hamilton	Nova Electronic Materials	$                     3,300.00
	Westbond2	Pisano/Flounders	Fanuc	$                     3,002.00
	Total Value			$           7,053,499.00
	Table 1.