UCB
Microfabrication Laboratory (Microlab)
Recharge
Rates
Effective 7/1/07
Access Fee |
$86.60/month |
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General Lab Use |
$36.00/hour |
$0.60/minute |
Special Equipment
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$33.00/hour |
$0.55/minute |
Exceptional
Equipment
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$37.20/hour |
$0.62/minute |
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Staff Services |
$68.40/hour |
$1.14/minute |
Use of equiment not listed below is included in General Lab Use rate (104 operating systems).
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Furnaces, Wafer Steppers, Aligners and Bonders Pattern Generator (for mask making) Lam Etchers (poly, oxide, nitride, Al) Other Etchers (tungsten, misc. mat.) |
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(For a complete list, click on Special Equipment) |
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ASML Lithography 5500/90 Stepper Applied Materials Precision 5000 CVD System Centura 150 mm Etch Processing Tool Novellus m2i System SVG8800 Coat/Develop Track Tystar 19/20 SiGe LPCVD System Leo-SEM |
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(For a complete list, click on Special Equipment) |
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UC Professors Max. monthly charge per student: |
$1,200 in lab fees and $1,400 in equipment fee (separately) |
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